Chapter 7 Novel Aberration Correction Concepts

Bernd Kabius, Harald Rose

Research output: Chapter in Book/Report/Conference proceedingChapter

10 Scopus citations

Abstract

The new concept for improving spatial resolution for in situ experiments in TEM mode based on Cs correction and monochromatization is presented. The loss in resolution caused by a wide-gap objective lens for this case can be compensated by a smaller energy width of the electron beam. Cc correction can also affect the damping envelope of temporal coherence. A larger fraction of the emitted electrons can be used for a Cc-corrected system compared with a TEM with electron beam monochromatization and Cs correction. This property can also be used for shorter exposure times or higher SNR. The advantage of Cc correction includes the coefficient of chromatic aberration can be reduced by a much greater amount. It also make no-impact on the brightness of the electron source and the electron beam current, which subsequently allows a high SNR.

Original languageEnglish (US)
Title of host publicationAdvances in IMAGING AND ELECTRON PHYSICS Aberration-Corrected Electron Microscopy
PublisherAcademic Press Inc.
Pages261-281
Number of pages21
ISBN (Print)9780123742209
DOIs
StatePublished - 2008

Publication series

NameAdvances in Imaging and Electron Physics
Volume153
ISSN (Print)1076-5670

All Science Journal Classification (ASJC) codes

  • Nuclear and High Energy Physics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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