The wafer flexure method was used to characterize the d31 coefficients and monitor their aging rates for a number of 52/48 sol-gel and 50/50 rf sputtered PZT films. Aging results showed that the d31 coefficient decreased in a linear fashion with the logarithm of time. The aging rates measured for the sol-gel films were found to be between 4% and 10% per decade with the thickest films tested displaying the smallest rates. Rates were measured at as much as 26% per decade when the sample was poled against the as-deposited polarization and a little as 2% per decade when poled in the preferential direction.
All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)