Characterization and aging response of the d31 piezoelectric coefficient of lead zirconate titanate thin films

Joseph F. Shepard, Fan Chu, Isaku Kanno, Susan E. Trolier-McKinstry

Research output: Contribution to journalArticle

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Abstract

The wafer flexure method was used to characterize the d31 coefficients and monitor their aging rates for a number of 52/48 sol-gel and 50/50 rf sputtered PZT films. Aging results showed that the d31 coefficient decreased in a linear fashion with the logarithm of time. The aging rates measured for the sol-gel films were found to be between 4% and 10% per decade with the thickest films tested displaying the smallest rates. Rates were measured at as much as 26% per decade when the sample was poled against the as-deposited polarization and a little as 2% per decade when poled in the preferential direction.

Original languageEnglish (US)
Pages (from-to)6711-6716
Number of pages6
JournalJournal of Applied Physics
Volume85
Issue number9
DOIs
StatePublished - May 1 1999

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All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

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