Characterization of Parylene-C using quartz thickness shear mode (TSM) resonators

Huiyan Wu, Hongfei Zu, Xiaotian Li, Qing Ming Wang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Due to its high sensitivity, repeatability and easy connection with electrical measurement systems, Quartz thickness-shear-mode (TSM) resonator is adopted to extract the complex shear modulus of Parylene-C films, which play an important role as both an effective wave-guiding layer and biocompatible interfacial layer in Shear-Horizontal Surface Acoustic Wave Device (SH-SAW, Love Mode). Parylene-C films of different thicknesses were deposited on the surface of AT-cut quartz TSM resonators, and admittance spectrums of these uncoated and coated TSM were measured by an impedance analyzer. Results indicated that the ideal thickness range for extraction was from 2.04 μm to 3.55 μm, effectively avoiding inadequate acoustic deformation as well as excessive electrical-response attenuation. The storage modulus G' and loss modulus G' of Parylene-C were 0.155±0.011 GPa and 4.78±0.44 GPa, respectively.

Original languageEnglish (US)
Title of host publication2013 Joint European Frequency and Time Forum and International Frequency Control Symposium, EFTF/IFC 2013
Pages787-790
Number of pages4
DOIs
StatePublished - Dec 1 2013
Event2013 Joint European Frequency and Time Forum and International Frequency Control Symposium, EFTF/IFC 2013 - Prague, Czech Republic
Duration: Jul 21 2013Jul 25 2013

Publication series

Name2013 Joint European Frequency and Time Forum and International Frequency Control Symposium, EFTF/IFC 2013

Other

Other2013 Joint European Frequency and Time Forum and International Frequency Control Symposium, EFTF/IFC 2013
CountryCzech Republic
CityPrague
Period7/21/137/25/13

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering

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