Characterization of the Thermal Boundary Resistance of a Ga2O3/4H-SiC Composite Wafer

Yiwen Song, Bikramjit Chatterjee, Craig McGray, Sarit Zhukovsky, Jacob H. Leach, Tina Hess, Brian M. Foley, Sukwon Choi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The β-gallium oxide (Ga2O3) material system offers the potential to dramatically improve the electrical performance and cost-effectiveness of next-generation power electronics. This is because of its ultra-wide bandgap (~4.8 eV) and the availability of high-quality single-crystal bulk substrates. However, the low thermal conductivity of Ga2O3 (11-27 W/m-K) implies that significant thermal challenges need to be overcome to commercialize Ga2O3 devices. In the present work, a single crystal (010) Ga2O3 wafer was integrated with a 4H-SiC substrate via fusion bonding to address this concern of poor thermal conductivity. A differential steady-state thermoreflectance method was established to measure the thermal boundary resistance at the Ga2O3/SiC interface (100 m2K/GW), which has yet to be reported due to the limited probing depth of conventional frequency- and time-domain thermoreflectance techniques.

Original languageEnglish (US)
Title of host publicationProceedings of the 19th InterSociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems, ITherm 2020
PublisherIEEE Computer Society
Pages154-157
Number of pages4
ISBN (Electronic)9781728197647
DOIs
StatePublished - Jul 2020
Event19th InterSociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems, ITherm 2020 - Virtual, Orlando, United States
Duration: Jul 21 2020Jul 23 2020

Publication series

NameInterSociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems, ITHERM
Volume2020-July
ISSN (Print)1936-3958

Conference

Conference19th InterSociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems, ITherm 2020
CountryUnited States
CityVirtual, Orlando
Period7/21/207/23/20

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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