Abstract
The quarter-wavelength (λ/4) acoustic matching layer is a vital component in medical ultrasonic transducers, which can bridge the large acoustic impedance mismatch between the piezoelectric material and the human body. At high frequencies (>50MHz), the λ/4 matching layers become extremely thin and the characterization of its properties becomes very challenging. We report a novel method to measure the phase velocity and attenuation of ultra-thin layers using the λ/4 matching principle. The method has been successfully used to measure a 14.6μm Epo-Tek 301 epoxy film on glass substrate and a 9.5μm sol-gel silicon oxide colloidal/polymer composite film on Si substrate.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 1048-1051 |
| Number of pages | 4 |
| Journal | Proceedings of the IEEE Ultrasonics Symposium |
| Volume | 1 |
| State | Published - 2003 |
| Event | 2003 IEEE Ultrasonics Symposium - Proceedings - Honolulu, HI, United States Duration: Oct 5 2003 → Oct 8 2003 |
All Science Journal Classification (ASJC) codes
- Acoustics and Ultrasonics