Charge transfer at surfaces: A model for ionization in SIMS

J. H. Lin, Barbara Jane Garrison

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Abstract

A microscopic model is presented to describe the probability of charge transfer for the desorption of ions from surfaces. Results from this model study provide a theoretical basis for understanding the ionization process in SIMS and ESD experiments. Predictions of the model that have a direct bearing on the interpretation of experimental data are emphasized in this study. We examine the effect of angle of ejection, both polar and azimuthal, and the nonconstant velocity during desorption due to a surface binding energy on the ionization probability.

Original languageEnglish (US)
Pages (from-to)1205-1208
Number of pages4
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume1
Issue number2
DOIs
StatePublished - Apr 1 1983

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All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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