Charged particle detection: Potential of love wave acoustic devices

Michael Pedrick, Bernhard R. Tittmann

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

An investigation of the dependence of film density on group and phase velocities in a Love Wave Device shows potential for acoustic-based charged particle detection (CPD). Exposure of an ion sensitive photoresist to charged particles causes localized changes in density through either scission or cross-linking. A theoretical model was developed to study ion fluence effects on Love Wave sensitivity based on: ion energy, effective density changes, layer thickness and mode selection. The model is based on a Poly(Methyl Methacralate) (PMMA) film deposited on a Quartz substrate. The effect of Helium ion fluence on the properties of PMMA has previously been studied. These guidelines were used as an initial basis for the prediction of helium ion detection in a PMMA layer. Procedures for experimental characterization of ion effects on the material properties of PMMA are reviewed. Techniques for experimental validation of the predicted velocity shifts are discussed. A Love Wave Device for CPD could potentially provide a cost-effective alternative to semiconductor or photo-based counterparts. The potential for monitoring ion implantation effects on material properties is also discussed.

Original languageEnglish (US)
Title of host publicationReview of Progress in Quantitative Nondestructive Evaluation
Subtitle of host publicationVolume 25B
Pages1476-1483
Number of pages8
Volume820 II
DOIs
StatePublished - Mar 6 2006
EventReview of Progress in Quantitative Nondestructive - Brunswick, ME, United States
Duration: Jul 31 2005Aug 5 2005

Other

OtherReview of Progress in Quantitative Nondestructive
CountryUnited States
CityBrunswick, ME
Period7/31/058/5/05

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

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