Charged particle detection: Potential of love wave acoustic devices

Michael Pedrick, Bernhard R. Tittmann

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

An investigation of the dependence of film density on group and phase velocities in a Love Wave Device shows potential for acoustic-based charged particle detection (CPD). Exposure of an ion sensitive photoresist to charged particles causes localized changes in density through either scission or cross-linking. A theoretical model was developed to study ion fluence effects on Love Wave sensitivity based on: ion energy, effective density changes, layer thickness and mode selection. The model is based on a Poly(Methyl Methacralate) (PMMA) film deposited on a Quartz substrate. The effect of Helium ion fluence on the properties of PMMA has previously been studied. These guidelines were used as an initial basis for the prediction of helium ion detection in a PMMA layer. Procedures for experimental characterization of ion effects on the material properties of PMMA are reviewed. Techniques for experimental validation of the predicted velocity shifts are discussed. A Love Wave Device for CPD could potentially provide a cost-effective alternative to semiconductor or photo-based counterparts. The potential for monitoring ion implantation effects on material properties is also discussed.

Original languageEnglish (US)
Title of host publicationReview of Progress in Quantitative Nondestructive Evaluation
Subtitle of host publicationVolume 25B
Pages1476-1483
Number of pages8
Volume820 II
DOIs
StatePublished - Mar 6 2006
EventReview of Progress in Quantitative Nondestructive - Brunswick, ME, United States
Duration: Jul 31 2005Aug 5 2005

Other

OtherReview of Progress in Quantitative Nondestructive
CountryUnited States
CityBrunswick, ME
Period7/31/058/5/05

Fingerprint

Love waves
charged particles
acoustics
helium ions
fluence
ions
phase velocity
photoresists
group velocity
ion implantation
cleavage
quartz
costs
causes
sensitivity
shift
predictions
energy

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

Cite this

Pedrick, M., & Tittmann, B. R. (2006). Charged particle detection: Potential of love wave acoustic devices. In Review of Progress in Quantitative Nondestructive Evaluation: Volume 25B (Vol. 820 II, pp. 1476-1483) https://doi.org/10.1063/1.2184697
Pedrick, Michael ; Tittmann, Bernhard R. / Charged particle detection : Potential of love wave acoustic devices. Review of Progress in Quantitative Nondestructive Evaluation: Volume 25B. Vol. 820 II 2006. pp. 1476-1483
@inproceedings{0a3cb228da844d3a8021efe1f1938273,
title = "Charged particle detection: Potential of love wave acoustic devices",
abstract = "An investigation of the dependence of film density on group and phase velocities in a Love Wave Device shows potential for acoustic-based charged particle detection (CPD). Exposure of an ion sensitive photoresist to charged particles causes localized changes in density through either scission or cross-linking. A theoretical model was developed to study ion fluence effects on Love Wave sensitivity based on: ion energy, effective density changes, layer thickness and mode selection. The model is based on a Poly(Methyl Methacralate) (PMMA) film deposited on a Quartz substrate. The effect of Helium ion fluence on the properties of PMMA has previously been studied. These guidelines were used as an initial basis for the prediction of helium ion detection in a PMMA layer. Procedures for experimental characterization of ion effects on the material properties of PMMA are reviewed. Techniques for experimental validation of the predicted velocity shifts are discussed. A Love Wave Device for CPD could potentially provide a cost-effective alternative to semiconductor or photo-based counterparts. The potential for monitoring ion implantation effects on material properties is also discussed.",
author = "Michael Pedrick and Tittmann, {Bernhard R.}",
year = "2006",
month = "3",
day = "6",
doi = "10.1063/1.2184697",
language = "English (US)",
isbn = "0735403120",
volume = "820 II",
pages = "1476--1483",
booktitle = "Review of Progress in Quantitative Nondestructive Evaluation",

}

Pedrick, M & Tittmann, BR 2006, Charged particle detection: Potential of love wave acoustic devices. in Review of Progress in Quantitative Nondestructive Evaluation: Volume 25B. vol. 820 II, pp. 1476-1483, Review of Progress in Quantitative Nondestructive, Brunswick, ME, United States, 7/31/05. https://doi.org/10.1063/1.2184697

Charged particle detection : Potential of love wave acoustic devices. / Pedrick, Michael; Tittmann, Bernhard R.

Review of Progress in Quantitative Nondestructive Evaluation: Volume 25B. Vol. 820 II 2006. p. 1476-1483.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Charged particle detection

T2 - Potential of love wave acoustic devices

AU - Pedrick, Michael

AU - Tittmann, Bernhard R.

PY - 2006/3/6

Y1 - 2006/3/6

N2 - An investigation of the dependence of film density on group and phase velocities in a Love Wave Device shows potential for acoustic-based charged particle detection (CPD). Exposure of an ion sensitive photoresist to charged particles causes localized changes in density through either scission or cross-linking. A theoretical model was developed to study ion fluence effects on Love Wave sensitivity based on: ion energy, effective density changes, layer thickness and mode selection. The model is based on a Poly(Methyl Methacralate) (PMMA) film deposited on a Quartz substrate. The effect of Helium ion fluence on the properties of PMMA has previously been studied. These guidelines were used as an initial basis for the prediction of helium ion detection in a PMMA layer. Procedures for experimental characterization of ion effects on the material properties of PMMA are reviewed. Techniques for experimental validation of the predicted velocity shifts are discussed. A Love Wave Device for CPD could potentially provide a cost-effective alternative to semiconductor or photo-based counterparts. The potential for monitoring ion implantation effects on material properties is also discussed.

AB - An investigation of the dependence of film density on group and phase velocities in a Love Wave Device shows potential for acoustic-based charged particle detection (CPD). Exposure of an ion sensitive photoresist to charged particles causes localized changes in density through either scission or cross-linking. A theoretical model was developed to study ion fluence effects on Love Wave sensitivity based on: ion energy, effective density changes, layer thickness and mode selection. The model is based on a Poly(Methyl Methacralate) (PMMA) film deposited on a Quartz substrate. The effect of Helium ion fluence on the properties of PMMA has previously been studied. These guidelines were used as an initial basis for the prediction of helium ion detection in a PMMA layer. Procedures for experimental characterization of ion effects on the material properties of PMMA are reviewed. Techniques for experimental validation of the predicted velocity shifts are discussed. A Love Wave Device for CPD could potentially provide a cost-effective alternative to semiconductor or photo-based counterparts. The potential for monitoring ion implantation effects on material properties is also discussed.

UR - http://www.scopus.com/inward/record.url?scp=33845455217&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33845455217&partnerID=8YFLogxK

U2 - 10.1063/1.2184697

DO - 10.1063/1.2184697

M3 - Conference contribution

AN - SCOPUS:33845455217

SN - 0735403120

SN - 9780735403123

VL - 820 II

SP - 1476

EP - 1483

BT - Review of Progress in Quantitative Nondestructive Evaluation

ER -

Pedrick M, Tittmann BR. Charged particle detection: Potential of love wave acoustic devices. In Review of Progress in Quantitative Nondestructive Evaluation: Volume 25B. Vol. 820 II. 2006. p. 1476-1483 https://doi.org/10.1063/1.2184697