CHEMICAL AND ION BEAM ETCH STUDIES OF POLYCRYSTALLINE SILICON.

P. A. Lester, R. Singh, D. A. Rice, R. N. Pangborn, S. Ashok, S. J. Fonash

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposia Proceedings
PublisherElsevier Science Publ Co
Pages199-204
Number of pages6
Volume5
ISBN (Print)0444006974
StatePublished - 1982

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Polysilicon
Ion beams
ion beams
silicon

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials

Cite this

Lester, P. A., Singh, R., Rice, D. A., Pangborn, R. N., Ashok, S., & Fonash, S. J. (1982). CHEMICAL AND ION BEAM ETCH STUDIES OF POLYCRYSTALLINE SILICON. In Materials Research Society Symposia Proceedings (Vol. 5, pp. 199-204). Elsevier Science Publ Co.
Lester, P. A. ; Singh, R. ; Rice, D. A. ; Pangborn, R. N. ; Ashok, S. ; Fonash, S. J. / CHEMICAL AND ION BEAM ETCH STUDIES OF POLYCRYSTALLINE SILICON. Materials Research Society Symposia Proceedings. Vol. 5 Elsevier Science Publ Co, 1982. pp. 199-204
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Lester, PA, Singh, R, Rice, DA, Pangborn, RN, Ashok, S & Fonash, SJ 1982, CHEMICAL AND ION BEAM ETCH STUDIES OF POLYCRYSTALLINE SILICON. in Materials Research Society Symposia Proceedings. vol. 5, Elsevier Science Publ Co, pp. 199-204.

CHEMICAL AND ION BEAM ETCH STUDIES OF POLYCRYSTALLINE SILICON. / Lester, P. A.; Singh, R.; Rice, D. A.; Pangborn, R. N.; Ashok, S.; Fonash, S. J.

Materials Research Society Symposia Proceedings. Vol. 5 Elsevier Science Publ Co, 1982. p. 199-204.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - CHEMICAL AND ION BEAM ETCH STUDIES OF POLYCRYSTALLINE SILICON.

AU - Lester, P. A.

AU - Singh, R.

AU - Rice, D. A.

AU - Pangborn, R. N.

AU - Ashok, S.

AU - Fonash, S. J.

PY - 1982

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M3 - Conference contribution

SN - 0444006974

VL - 5

SP - 199

EP - 204

BT - Materials Research Society Symposia Proceedings

PB - Elsevier Science Publ Co

ER -

Lester PA, Singh R, Rice DA, Pangborn RN, Ashok S, Fonash SJ. CHEMICAL AND ION BEAM ETCH STUDIES OF POLYCRYSTALLINE SILICON. In Materials Research Society Symposia Proceedings. Vol. 5. Elsevier Science Publ Co. 1982. p. 199-204