Abstract
Silver tantalate niobate films are candidates for temperature stable microwave dielectrics. In this work, a chemical solution deposition synthesis method was developed for Ag x (Ta0.5Nb0.5) O3-y films on Pt-coated Si substrates. Stable solutions with a range of silver stoichiometries were prepared using 2-methoxyethanol and pyridine as solvents, from AgNO3 and Nb and Ta ethoxide precursors. It was extremely difficult to prepare phase-pure perovskite films of Ag(Ta 0.5Nb0.5)O3 on Pt-coated Si subtrates; instead a mixture of perovskite and natrotantite phases was identified. Such mixed phase films had dielectric constant r and dielectric loss tanδ values ranging from 200±20 to 270±25 and 0.006±0.002 to 0.002±0.001 at 100kHz, respectively, depending on the firing temperature. For Ag2(Ta0.5Nb0.5)4O11, Ag0.8(Ta0.5Nb0.5)O2.9, Ag 0.85(Ta0.5Nb0.5)O2.925 and Ag 0.9(Ta0.5Nb0.5)O2.95 films, mainly the natrotantite phase was observed. The r values of these films were between 70±10 and 130±15 with tan δ values of 0.008±0.002 at 100 kHz.
Original language | English (US) |
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Pages (from-to) | 407-414 |
Number of pages | 8 |
Journal | Journal of Sol-Gel Science and Technology |
Volume | 42 |
Issue number | 3 |
DOIs | |
State | Published - Jun 1 2007 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Ceramics and Composites
- Chemistry(all)
- Biomaterials
- Condensed Matter Physics
- Materials Chemistry