TY - JOUR
T1 - Chemical solution deposited silver tantalate niobate, Ag x (Ta0.5Nb0.5)O3-y , thin films on (111)Pt/Ti/SiO2/(100)Si substrates
AU - Telli, Mustafa Burak
AU - Trolier-Mckinstry, Susan
AU - Woodward, David Ian
AU - Reaney, Ian Michael
N1 - Funding Information:
Acknowledgments We wish to acknowledge financial support from Center for Dielectric Studies during this project. We also wish to thank Prof. Clive Alan Randall for his helpful comments of the TEM results.
PY - 2007/6
Y1 - 2007/6
N2 - Silver tantalate niobate films are candidates for temperature stable microwave dielectrics. In this work, a chemical solution deposition synthesis method was developed for Ag x (Ta0.5Nb0.5) O3-y films on Pt-coated Si substrates. Stable solutions with a range of silver stoichiometries were prepared using 2-methoxyethanol and pyridine as solvents, from AgNO3 and Nb and Ta ethoxide precursors. It was extremely difficult to prepare phase-pure perovskite films of Ag(Ta 0.5Nb0.5)O3 on Pt-coated Si subtrates; instead a mixture of perovskite and natrotantite phases was identified. Such mixed phase films had dielectric constant r and dielectric loss tanδ values ranging from 200±20 to 270±25 and 0.006±0.002 to 0.002±0.001 at 100kHz, respectively, depending on the firing temperature. For Ag2(Ta0.5Nb0.5)4O11, Ag0.8(Ta0.5Nb0.5)O2.9, Ag 0.85(Ta0.5Nb0.5)O2.925 and Ag 0.9(Ta0.5Nb0.5)O2.95 films, mainly the natrotantite phase was observed. The r values of these films were between 70±10 and 130±15 with tan δ values of 0.008±0.002 at 100 kHz.
AB - Silver tantalate niobate films are candidates for temperature stable microwave dielectrics. In this work, a chemical solution deposition synthesis method was developed for Ag x (Ta0.5Nb0.5) O3-y films on Pt-coated Si substrates. Stable solutions with a range of silver stoichiometries were prepared using 2-methoxyethanol and pyridine as solvents, from AgNO3 and Nb and Ta ethoxide precursors. It was extremely difficult to prepare phase-pure perovskite films of Ag(Ta 0.5Nb0.5)O3 on Pt-coated Si subtrates; instead a mixture of perovskite and natrotantite phases was identified. Such mixed phase films had dielectric constant r and dielectric loss tanδ values ranging from 200±20 to 270±25 and 0.006±0.002 to 0.002±0.001 at 100kHz, respectively, depending on the firing temperature. For Ag2(Ta0.5Nb0.5)4O11, Ag0.8(Ta0.5Nb0.5)O2.9, Ag 0.85(Ta0.5Nb0.5)O2.925 and Ag 0.9(Ta0.5Nb0.5)O2.95 films, mainly the natrotantite phase was observed. The r values of these films were between 70±10 and 130±15 with tan δ values of 0.008±0.002 at 100 kHz.
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U2 - 10.1007/s10971-006-0204-8
DO - 10.1007/s10971-006-0204-8
M3 - Article
AN - SCOPUS:34247385874
VL - 42
SP - 407
EP - 414
JO - Journal of Sol-Gel Science and Technology
JF - Journal of Sol-Gel Science and Technology
SN - 0928-0707
IS - 3
ER -