Chemical solution deposited silver tantalate niobate, Ag x (Ta0.5Nb0.5)O3-y , thin films on (111)Pt/Ti/SiO2/(100)Si substrates

Mustafa Burak Telli, Susan E. Trolier-McKinstry, David Ian Woodward, Ian Michael Reaney

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

Silver tantalate niobate films are candidates for temperature stable microwave dielectrics. In this work, a chemical solution deposition synthesis method was developed for Ag x (Ta0.5Nb0.5) O3-y films on Pt-coated Si substrates. Stable solutions with a range of silver stoichiometries were prepared using 2-methoxyethanol and pyridine as solvents, from AgNO3 and Nb and Ta ethoxide precursors. It was extremely difficult to prepare phase-pure perovskite films of Ag(Ta 0.5Nb0.5)O3 on Pt-coated Si subtrates; instead a mixture of perovskite and natrotantite phases was identified. Such mixed phase films had dielectric constant r and dielectric loss tanδ values ranging from 200±20 to 270±25 and 0.006±0.002 to 0.002±0.001 at 100kHz, respectively, depending on the firing temperature. For Ag2(Ta0.5Nb0.5)4O11, Ag0.8(Ta0.5Nb0.5)O2.9, Ag 0.85(Ta0.5Nb0.5)O2.925 and Ag 0.9(Ta0.5Nb0.5)O2.95 films, mainly the natrotantite phase was observed. The r values of these films were between 70±10 and 130±15 with tan δ values of 0.008±0.002 at 100 kHz.

Original languageEnglish (US)
Pages (from-to)407-414
Number of pages8
JournalJournal of Sol-Gel Science and Technology
Volume42
Issue number3
DOIs
StatePublished - Jun 1 2007

Fingerprint

niobates
Silver
silver
Thin films
Substrates
thin films
Perovskite
Dielectric losses
Stoichiometry
dielectric loss
Permittivity
Pyridine
Microwaves
stoichiometry
pyridines
Temperature
permittivity
microwaves
temperature
synthesis

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Chemistry(all)
  • Biomaterials
  • Condensed Matter Physics
  • Materials Chemistry

Cite this

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title = "Chemical solution deposited silver tantalate niobate, Ag x (Ta0.5Nb0.5)O3-y , thin films on (111)Pt/Ti/SiO2/(100)Si substrates",
abstract = "Silver tantalate niobate films are candidates for temperature stable microwave dielectrics. In this work, a chemical solution deposition synthesis method was developed for Ag x (Ta0.5Nb0.5) O3-y films on Pt-coated Si substrates. Stable solutions with a range of silver stoichiometries were prepared using 2-methoxyethanol and pyridine as solvents, from AgNO3 and Nb and Ta ethoxide precursors. It was extremely difficult to prepare phase-pure perovskite films of Ag(Ta 0.5Nb0.5)O3 on Pt-coated Si subtrates; instead a mixture of perovskite and natrotantite phases was identified. Such mixed phase films had dielectric constant r and dielectric loss tanδ values ranging from 200±20 to 270±25 and 0.006±0.002 to 0.002±0.001 at 100kHz, respectively, depending on the firing temperature. For Ag2(Ta0.5Nb0.5)4O11, Ag0.8(Ta0.5Nb0.5)O2.9, Ag 0.85(Ta0.5Nb0.5)O2.925 and Ag 0.9(Ta0.5Nb0.5)O2.95 films, mainly the natrotantite phase was observed. The r values of these films were between 70±10 and 130±15 with tan δ values of 0.008±0.002 at 100 kHz.",
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Chemical solution deposited silver tantalate niobate, Ag x (Ta0.5Nb0.5)O3-y , thin films on (111)Pt/Ti/SiO2/(100)Si substrates. / Telli, Mustafa Burak; Trolier-McKinstry, Susan E.; Woodward, David Ian; Reaney, Ian Michael.

In: Journal of Sol-Gel Science and Technology, Vol. 42, No. 3, 01.06.2007, p. 407-414.

Research output: Contribution to journalArticle

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AU - Telli, Mustafa Burak

AU - Trolier-McKinstry, Susan E.

AU - Woodward, David Ian

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AB - Silver tantalate niobate films are candidates for temperature stable microwave dielectrics. In this work, a chemical solution deposition synthesis method was developed for Ag x (Ta0.5Nb0.5) O3-y films on Pt-coated Si substrates. Stable solutions with a range of silver stoichiometries were prepared using 2-methoxyethanol and pyridine as solvents, from AgNO3 and Nb and Ta ethoxide precursors. It was extremely difficult to prepare phase-pure perovskite films of Ag(Ta 0.5Nb0.5)O3 on Pt-coated Si subtrates; instead a mixture of perovskite and natrotantite phases was identified. Such mixed phase films had dielectric constant r and dielectric loss tanδ values ranging from 200±20 to 270±25 and 0.006±0.002 to 0.002±0.001 at 100kHz, respectively, depending on the firing temperature. For Ag2(Ta0.5Nb0.5)4O11, Ag0.8(Ta0.5Nb0.5)O2.9, Ag 0.85(Ta0.5Nb0.5)O2.925 and Ag 0.9(Ta0.5Nb0.5)O2.95 films, mainly the natrotantite phase was observed. The r values of these films were between 70±10 and 130±15 with tan δ values of 0.008±0.002 at 100 kHz.

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