Abstract
Silver tantalate niobate films are candidates for temperature stable microwave dielectrics. In this work, a chemical solution deposition synthesis method was developed for Ag x (Ta0.5Nb0.5) O3-y films on Pt-coated Si substrates. Stable solutions with a range of silver stoichiometries were prepared using 2-methoxyethanol and pyridine as solvents, from AgNO3 and Nb and Ta ethoxide precursors. It was extremely difficult to prepare phase-pure perovskite films of Ag(Ta 0.5Nb0.5)O3 on Pt-coated Si subtrates; instead a mixture of perovskite and natrotantite phases was identified. Such mixed phase films had dielectric constant r and dielectric loss tanδ values ranging from 200±20 to 270±25 and 0.006±0.002 to 0.002±0.001 at 100kHz, respectively, depending on the firing temperature. For Ag2(Ta0.5Nb0.5)4O11, Ag0.8(Ta0.5Nb0.5)O2.9, Ag 0.85(Ta0.5Nb0.5)O2.925 and Ag 0.9(Ta0.5Nb0.5)O2.95 films, mainly the natrotantite phase was observed. The r values of these films were between 70±10 and 130±15 with tan δ values of 0.008±0.002 at 100 kHz.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 407-414 |
| Number of pages | 8 |
| Journal | Journal of Sol-Gel Science and Technology |
| Volume | 42 |
| Issue number | 3 |
| DOIs | |
| State | Published - Jun 1 2007 |
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All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Ceramics and Composites
- Chemistry(all)
- Biomaterials
- Condensed Matter Physics
- Materials Chemistry
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Chemical solution deposited silver tantalate niobate, Ag x (Ta0.5Nb0.5)O3-y , thin films on (111)Pt/Ti/SiO2/(100)Si substrates. / Telli, Mustafa Burak; Trolier-McKinstry, Susan E.; Woodward, David Ian; Reaney, Ian Michael.
In: Journal of Sol-Gel Science and Technology, Vol. 42, No. 3, 01.06.2007, p. 407-414.Research output: Contribution to journal › Article
TY - JOUR
T1 - Chemical solution deposited silver tantalate niobate, Ag x (Ta0.5Nb0.5)O3-y , thin films on (111)Pt/Ti/SiO2/(100)Si substrates
AU - Telli, Mustafa Burak
AU - Trolier-McKinstry, Susan E.
AU - Woodward, David Ian
AU - Reaney, Ian Michael
PY - 2007/6/1
Y1 - 2007/6/1
N2 - Silver tantalate niobate films are candidates for temperature stable microwave dielectrics. In this work, a chemical solution deposition synthesis method was developed for Ag x (Ta0.5Nb0.5) O3-y films on Pt-coated Si substrates. Stable solutions with a range of silver stoichiometries were prepared using 2-methoxyethanol and pyridine as solvents, from AgNO3 and Nb and Ta ethoxide precursors. It was extremely difficult to prepare phase-pure perovskite films of Ag(Ta 0.5Nb0.5)O3 on Pt-coated Si subtrates; instead a mixture of perovskite and natrotantite phases was identified. Such mixed phase films had dielectric constant r and dielectric loss tanδ values ranging from 200±20 to 270±25 and 0.006±0.002 to 0.002±0.001 at 100kHz, respectively, depending on the firing temperature. For Ag2(Ta0.5Nb0.5)4O11, Ag0.8(Ta0.5Nb0.5)O2.9, Ag 0.85(Ta0.5Nb0.5)O2.925 and Ag 0.9(Ta0.5Nb0.5)O2.95 films, mainly the natrotantite phase was observed. The r values of these films were between 70±10 and 130±15 with tan δ values of 0.008±0.002 at 100 kHz.
AB - Silver tantalate niobate films are candidates for temperature stable microwave dielectrics. In this work, a chemical solution deposition synthesis method was developed for Ag x (Ta0.5Nb0.5) O3-y films on Pt-coated Si substrates. Stable solutions with a range of silver stoichiometries were prepared using 2-methoxyethanol and pyridine as solvents, from AgNO3 and Nb and Ta ethoxide precursors. It was extremely difficult to prepare phase-pure perovskite films of Ag(Ta 0.5Nb0.5)O3 on Pt-coated Si subtrates; instead a mixture of perovskite and natrotantite phases was identified. Such mixed phase films had dielectric constant r and dielectric loss tanδ values ranging from 200±20 to 270±25 and 0.006±0.002 to 0.002±0.001 at 100kHz, respectively, depending on the firing temperature. For Ag2(Ta0.5Nb0.5)4O11, Ag0.8(Ta0.5Nb0.5)O2.9, Ag 0.85(Ta0.5Nb0.5)O2.925 and Ag 0.9(Ta0.5Nb0.5)O2.95 films, mainly the natrotantite phase was observed. The r values of these films were between 70±10 and 130±15 with tan δ values of 0.008±0.002 at 100 kHz.
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U2 - 10.1007/s10971-006-0204-8
DO - 10.1007/s10971-006-0204-8
M3 - Article
VL - 42
SP - 407
EP - 414
JO - Journal of Sol-Gel Science and Technology
JF - Journal of Sol-Gel Science and Technology
SN - 0928-0707
IS - 3
ER -