Chopper-modulated gas chromatography electroantennography enabled using high-temperature MEMS flow control device

Ming Da Zhou, Muhammad Akbar, Andrew J. Myrick, Yiqiu Xia, Waleed J. Khan, Xiang Gao, Thomas C. Baker, Si Yang Zheng

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

We report the design, fabrication and characterization of a microelectromechanical systems (MEMS) flow control device for gas chromatography (GC) with the capability of sustaining high-temperature environments. We further demonstrate the use of this new device in a novel MEMS chopper-modulated gas chromatography-electroantennography (MEMS-GC-EAG) system to identify specific volatile organic compounds (VOCs) at extremely low concentrations. The device integrates four pneumatically actuated microvalves constructed via thermocompression bonding of the polyimide membrane between two glass substrates with microstructures. The overall size of the device is 32 mm × 32 mm, and it is packaged in a 50 mm × 50 mm aluminum housing that provides access to the fluidic connections and allows thermal control. The characterization reveals that each microvalve in the flow control chip provides an ON to OFF ratio as high as 1000:1. The device can operate reliably for more than 1 million switching cycles at a working temperature of 300 °C. Using the MEMS-GC-EAG system, we demonstrate the successful detection of cis-11-hexadecenal with a concentration as low as 1 pg at a demodulation frequency of 2 Hz by using an antenna harvested from the male Helicoverpa Virescens moth. In addition, 1 μg of a green leafy volatile (GLV) is barely detected using the conventional GC-EAG, while MEMS-GC-EAG can readily detect the same amount of GLV, with an improvement in the signal-to-noise ratio (SNR) of ~22 times. We expect that the flow control device presented in this report will allow researchers to explore new applications and make new discoveries in entomology and other fields that require high-temperature flow control at the microscale.

Original languageEnglish (US)
Article number17062
JournalMicrosystems and Nanoengineering
Volume3
DOIs
StatePublished - Jan 1 2017

Fingerprint

electric choppers
control equipment
gas chromatography
Flow control
Gas chromatography
microelectromechanical systems
MEMS
entomology
Temperature
moths
high temperature environments
Volatile Organic Compounds
sustaining
volatile organic compounds
fluidics
Fluidics
demodulation
Demodulation
Aluminum
Volatile organic compounds

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics
  • Materials Science (miscellaneous)
  • Condensed Matter Physics
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

Cite this

@article{eb99a5d49f5c42b4b8d2b95c017da16c,
title = "Chopper-modulated gas chromatography electroantennography enabled using high-temperature MEMS flow control device",
abstract = "We report the design, fabrication and characterization of a microelectromechanical systems (MEMS) flow control device for gas chromatography (GC) with the capability of sustaining high-temperature environments. We further demonstrate the use of this new device in a novel MEMS chopper-modulated gas chromatography-electroantennography (MEMS-GC-EAG) system to identify specific volatile organic compounds (VOCs) at extremely low concentrations. The device integrates four pneumatically actuated microvalves constructed via thermocompression bonding of the polyimide membrane between two glass substrates with microstructures. The overall size of the device is 32 mm × 32 mm, and it is packaged in a 50 mm × 50 mm aluminum housing that provides access to the fluidic connections and allows thermal control. The characterization reveals that each microvalve in the flow control chip provides an ON to OFF ratio as high as 1000:1. The device can operate reliably for more than 1 million switching cycles at a working temperature of 300 °C. Using the MEMS-GC-EAG system, we demonstrate the successful detection of cis-11-hexadecenal with a concentration as low as 1 pg at a demodulation frequency of 2 Hz by using an antenna harvested from the male Helicoverpa Virescens moth. In addition, 1 μg of a green leafy volatile (GLV) is barely detected using the conventional GC-EAG, while MEMS-GC-EAG can readily detect the same amount of GLV, with an improvement in the signal-to-noise ratio (SNR) of ~22 times. We expect that the flow control device presented in this report will allow researchers to explore new applications and make new discoveries in entomology and other fields that require high-temperature flow control at the microscale.",
author = "Zhou, {Ming Da} and Muhammad Akbar and Myrick, {Andrew J.} and Yiqiu Xia and Khan, {Waleed J.} and Xiang Gao and Baker, {Thomas C.} and Zheng, {Si Yang}",
year = "2017",
month = "1",
day = "1",
doi = "10.1038/micronano.2017.62",
language = "English (US)",
volume = "3",
journal = "Microsystems and Nanoengineering",
issn = "2055-7434",
publisher = "Nature Publishing Group",

}

Chopper-modulated gas chromatography electroantennography enabled using high-temperature MEMS flow control device. / Zhou, Ming Da; Akbar, Muhammad; Myrick, Andrew J.; Xia, Yiqiu; Khan, Waleed J.; Gao, Xiang; Baker, Thomas C.; Zheng, Si Yang.

In: Microsystems and Nanoengineering, Vol. 3, 17062, 01.01.2017.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Chopper-modulated gas chromatography electroantennography enabled using high-temperature MEMS flow control device

AU - Zhou, Ming Da

AU - Akbar, Muhammad

AU - Myrick, Andrew J.

AU - Xia, Yiqiu

AU - Khan, Waleed J.

AU - Gao, Xiang

AU - Baker, Thomas C.

AU - Zheng, Si Yang

PY - 2017/1/1

Y1 - 2017/1/1

N2 - We report the design, fabrication and characterization of a microelectromechanical systems (MEMS) flow control device for gas chromatography (GC) with the capability of sustaining high-temperature environments. We further demonstrate the use of this new device in a novel MEMS chopper-modulated gas chromatography-electroantennography (MEMS-GC-EAG) system to identify specific volatile organic compounds (VOCs) at extremely low concentrations. The device integrates four pneumatically actuated microvalves constructed via thermocompression bonding of the polyimide membrane between two glass substrates with microstructures. The overall size of the device is 32 mm × 32 mm, and it is packaged in a 50 mm × 50 mm aluminum housing that provides access to the fluidic connections and allows thermal control. The characterization reveals that each microvalve in the flow control chip provides an ON to OFF ratio as high as 1000:1. The device can operate reliably for more than 1 million switching cycles at a working temperature of 300 °C. Using the MEMS-GC-EAG system, we demonstrate the successful detection of cis-11-hexadecenal with a concentration as low as 1 pg at a demodulation frequency of 2 Hz by using an antenna harvested from the male Helicoverpa Virescens moth. In addition, 1 μg of a green leafy volatile (GLV) is barely detected using the conventional GC-EAG, while MEMS-GC-EAG can readily detect the same amount of GLV, with an improvement in the signal-to-noise ratio (SNR) of ~22 times. We expect that the flow control device presented in this report will allow researchers to explore new applications and make new discoveries in entomology and other fields that require high-temperature flow control at the microscale.

AB - We report the design, fabrication and characterization of a microelectromechanical systems (MEMS) flow control device for gas chromatography (GC) with the capability of sustaining high-temperature environments. We further demonstrate the use of this new device in a novel MEMS chopper-modulated gas chromatography-electroantennography (MEMS-GC-EAG) system to identify specific volatile organic compounds (VOCs) at extremely low concentrations. The device integrates four pneumatically actuated microvalves constructed via thermocompression bonding of the polyimide membrane between two glass substrates with microstructures. The overall size of the device is 32 mm × 32 mm, and it is packaged in a 50 mm × 50 mm aluminum housing that provides access to the fluidic connections and allows thermal control. The characterization reveals that each microvalve in the flow control chip provides an ON to OFF ratio as high as 1000:1. The device can operate reliably for more than 1 million switching cycles at a working temperature of 300 °C. Using the MEMS-GC-EAG system, we demonstrate the successful detection of cis-11-hexadecenal with a concentration as low as 1 pg at a demodulation frequency of 2 Hz by using an antenna harvested from the male Helicoverpa Virescens moth. In addition, 1 μg of a green leafy volatile (GLV) is barely detected using the conventional GC-EAG, while MEMS-GC-EAG can readily detect the same amount of GLV, with an improvement in the signal-to-noise ratio (SNR) of ~22 times. We expect that the flow control device presented in this report will allow researchers to explore new applications and make new discoveries in entomology and other fields that require high-temperature flow control at the microscale.

UR - http://www.scopus.com/inward/record.url?scp=85068970850&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85068970850&partnerID=8YFLogxK

U2 - 10.1038/micronano.2017.62

DO - 10.1038/micronano.2017.62

M3 - Article

AN - SCOPUS:85068970850

VL - 3

JO - Microsystems and Nanoengineering

JF - Microsystems and Nanoengineering

SN - 2055-7434

M1 - 17062

ER -