Closed-loop disturbance identification and controller tuning for discrete manufacturing processes

Research output: Contribution to specialist publicationArticle

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A closed-loop identification procedure for pure gain-plus noise processes is presented for a family of disturbances that model drift in a discrete-part manufacturing system. Tuning techniques for the identified disturbance are provided for proportional integral (PI) controllers. These include the particular case of exponentially weighted moving average controllers, popular in semiconductor manufacturing. Expressions are derived for the mean squared deviation of the quality characteristic and for the variance of the adjustments. An optimization model is presented that balances adjustment variance with output variance. The optimal trade-off solution for a constrained PI controller is shown to depend on the assumption of no drift.

Original languageEnglish (US)
Number of pages8
Specialist publicationTechnometrics
StatePublished - May 2002

All Science Journal Classification (ASJC) codes

  • Statistics and Probability
  • Modeling and Simulation
  • Applied Mathematics


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