Closed-loop disturbance identification and controller tuning for discrete manufacturing processes

Research output: Contribution to specialist publicationArticle

11 Citations (Scopus)

Abstract

A closed-loop identification procedure for pure gain-plus noise processes is presented for a family of disturbances that model drift in a discrete-part manufacturing system. Tuning techniques for the identified disturbance are provided for proportional integral (PI) controllers. These include the particular case of exponentially weighted moving average controllers, popular in semiconductor manufacturing. Expressions are derived for the mean squared deviation of the quality characteristic and for the variance of the adjustments. An optimization model is presented that balances adjustment variance with output variance. The optimal trade-off solution for a constrained PI controller is shown to depend on the assumption of no drift.

Original languageEnglish (US)
Pages134-141
Number of pages8
Volume44
No2
Specialist publicationTechnometrics
DOIs
StatePublished - May 1 2002

Fingerprint

Closed-loop
Tuning
Manufacturing
Disturbance
Controller
Adjustment
Directly proportional
Exponentially Weighted Moving Average
Semiconductor Manufacturing
Optimization Model
Deviation
Trade-offs
Output
Model
Family

All Science Journal Classification (ASJC) codes

  • Statistics and Probability
  • Modeling and Simulation
  • Applied Mathematics

Cite this

@misc{84692a7cb6624ef48dcfbcbb856df273,
title = "Closed-loop disturbance identification and controller tuning for discrete manufacturing processes",
abstract = "A closed-loop identification procedure for pure gain-plus noise processes is presented for a family of disturbances that model drift in a discrete-part manufacturing system. Tuning techniques for the identified disturbance are provided for proportional integral (PI) controllers. These include the particular case of exponentially weighted moving average controllers, popular in semiconductor manufacturing. Expressions are derived for the mean squared deviation of the quality characteristic and for the variance of the adjustments. An optimization model is presented that balances adjustment variance with output variance. The optimal trade-off solution for a constrained PI controller is shown to depend on the assumption of no drift.",
author = "{Del Castillo}, Enrique",
year = "2002",
month = "5",
day = "1",
doi = "10.1198/004017002317375082",
language = "English (US)",
volume = "44",
pages = "134--141",
journal = "Technometrics",
issn = "0040-1706",
publisher = "American Statistical Association",

}

Closed-loop disturbance identification and controller tuning for discrete manufacturing processes. / Del Castillo, Enrique.

In: Technometrics, Vol. 44, No. 2, 01.05.2002, p. 134-141.

Research output: Contribution to specialist publicationArticle

TY - GEN

T1 - Closed-loop disturbance identification and controller tuning for discrete manufacturing processes

AU - Del Castillo, Enrique

PY - 2002/5/1

Y1 - 2002/5/1

N2 - A closed-loop identification procedure for pure gain-plus noise processes is presented for a family of disturbances that model drift in a discrete-part manufacturing system. Tuning techniques for the identified disturbance are provided for proportional integral (PI) controllers. These include the particular case of exponentially weighted moving average controllers, popular in semiconductor manufacturing. Expressions are derived for the mean squared deviation of the quality characteristic and for the variance of the adjustments. An optimization model is presented that balances adjustment variance with output variance. The optimal trade-off solution for a constrained PI controller is shown to depend on the assumption of no drift.

AB - A closed-loop identification procedure for pure gain-plus noise processes is presented for a family of disturbances that model drift in a discrete-part manufacturing system. Tuning techniques for the identified disturbance are provided for proportional integral (PI) controllers. These include the particular case of exponentially weighted moving average controllers, popular in semiconductor manufacturing. Expressions are derived for the mean squared deviation of the quality characteristic and for the variance of the adjustments. An optimization model is presented that balances adjustment variance with output variance. The optimal trade-off solution for a constrained PI controller is shown to depend on the assumption of no drift.

UR - http://www.scopus.com/inward/record.url?scp=0036567557&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0036567557&partnerID=8YFLogxK

U2 - 10.1198/004017002317375082

DO - 10.1198/004017002317375082

M3 - Article

AN - SCOPUS:0036567557

VL - 44

SP - 134

EP - 141

JO - Technometrics

JF - Technometrics

SN - 0040-1706

ER -