Abstract
A closed-loop identification procedure for pure gain-plus noise processes is presented for a family of disturbances that model drift in a discrete-part manufacturing system. Tuning techniques for the identified disturbance are provided for proportional integral (PI) controllers. These include the particular case of exponentially weighted moving average controllers, popular in semiconductor manufacturing. Expressions are derived for the mean squared deviation of the quality characteristic and for the variance of the adjustments. An optimization model is presented that balances adjustment variance with output variance. The optimal trade-off solution for a constrained PI controller is shown to depend on the assumption of no drift.
| Original language | English (US) |
|---|---|
| Pages | 134-141 |
| Number of pages | 8 |
| Volume | 44 |
| No | 2 |
| Specialist publication | Technometrics |
| DOIs | |
| State | Published - May 1 2002 |
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All Science Journal Classification (ASJC) codes
- Statistics and Probability
- Modeling and Simulation
- Applied Mathematics
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Closed-loop disturbance identification and controller tuning for discrete manufacturing processes. / Del Castillo, Enrique.
In: Technometrics, Vol. 44, No. 2, 01.05.2002, p. 134-141.Research output: Contribution to specialist publication › Article
TY - GEN
T1 - Closed-loop disturbance identification and controller tuning for discrete manufacturing processes
AU - Del Castillo, Enrique
PY - 2002/5/1
Y1 - 2002/5/1
N2 - A closed-loop identification procedure for pure gain-plus noise processes is presented for a family of disturbances that model drift in a discrete-part manufacturing system. Tuning techniques for the identified disturbance are provided for proportional integral (PI) controllers. These include the particular case of exponentially weighted moving average controllers, popular in semiconductor manufacturing. Expressions are derived for the mean squared deviation of the quality characteristic and for the variance of the adjustments. An optimization model is presented that balances adjustment variance with output variance. The optimal trade-off solution for a constrained PI controller is shown to depend on the assumption of no drift.
AB - A closed-loop identification procedure for pure gain-plus noise processes is presented for a family of disturbances that model drift in a discrete-part manufacturing system. Tuning techniques for the identified disturbance are provided for proportional integral (PI) controllers. These include the particular case of exponentially weighted moving average controllers, popular in semiconductor manufacturing. Expressions are derived for the mean squared deviation of the quality characteristic and for the variance of the adjustments. An optimization model is presented that balances adjustment variance with output variance. The optimal trade-off solution for a constrained PI controller is shown to depend on the assumption of no drift.
UR - http://www.scopus.com/inward/record.url?scp=0036567557&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0036567557&partnerID=8YFLogxK
U2 - 10.1198/004017002317375082
DO - 10.1198/004017002317375082
M3 - Article
AN - SCOPUS:0036567557
VL - 44
SP - 134
EP - 141
JO - Technometrics
JF - Technometrics
SN - 0040-1706
ER -