Coated Tips for Scanning Thermal Microscopy

Nicolás Duarte, Peter Eklund, Srinivas A. Tadigadapa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

This paper presents a unique solution to the inaccuracies produced when thermally scanning various micro and nano systems with thermistor tip scanning thermal microscopy (SThM). Under dc measurement conditions, thermistor tip heating induces perturbations in the measured system that change with sample properties like material and geometry. As a result, normal SThM scans are affected by errors that make it difficult to interpret the 2D-temperature scans of such systems. By coating the SThM tips with a thermally resistive material (100nm of Si 3N 4) we demonstrate that the temperature dependence on sample material and geometry can be minimized and the tip heating problem can be mitigated to that of a constant temperature offset problem. Included are the first images of coated scanning thermal microscopy (C-SThM) as well as a lumped model that describes the basis of the improvement seen in the thermal images.

Original languageEnglish (US)
Title of host publicationMEMS/MOEMS Components and Their Applications IV
Volume6464
DOIs
StatePublished - May 22 2007
EventMEMS/MOEMS Components and Their Applications IV - San Jose, CA, United States
Duration: Jan 22 2007Jan 23 2007

Other

OtherMEMS/MOEMS Components and Their Applications IV
CountryUnited States
CitySan Jose, CA
Period1/22/071/23/07

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

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  • Cite this

    Duarte, N., Eklund, P., & Tadigadapa, S. A. (2007). Coated Tips for Scanning Thermal Microscopy. In MEMS/MOEMS Components and Their Applications IV (Vol. 6464). [646408] https://doi.org/10.1117/12.702157