Combined molecular dynamics and analytical model for repetitive cluster bombardment of solids

Barbara Jane Garrison, Robert J. Paruch, Zbigniew Postawa

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

Molecular dynamics simulations of repetitive bombardment of solids by keV cluster beams have generated so much data that easy interpretations are not possible. Moreover, although the MD simulations remove 3-4 nm of material, that is not sufficient material to determine a depth profile. The recently developed steady-state statistical sputtering model (SS-SSM) uses information from the MD simulations and incorporates it into a set of differential equations to predict a depth profile. In this study the distributions that provide the input to the SS-SSM are compared for simulations of 15 keV bombardment of Ag(111) by C 60, Au3 and Ar872 cluster beams.

Original languageEnglish (US)
Pages (from-to)196-199
Number of pages4
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume303
DOIs
StatePublished - Jan 1 2013

Fingerprint

Sputtering
Molecular dynamics
bombardment
Analytical models
Dynamic models
molecular dynamics
Information use
Differential equations
simulation
sputtering
Computer simulation
profiles
differential equations

All Science Journal Classification (ASJC) codes

  • Nuclear and High Energy Physics
  • Instrumentation

Cite this

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Combined molecular dynamics and analytical model for repetitive cluster bombardment of solids. / Garrison, Barbara Jane; Paruch, Robert J.; Postawa, Zbigniew.

In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 303, 01.01.2013, p. 196-199.

Research output: Contribution to journalArticle

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