Molecular dynamics simulations of repetitive bombardment of solids by keV cluster beams have generated so much data that easy interpretations are not possible. Moreover, although the MD simulations remove 3-4 nm of material, that is not sufficient material to determine a depth profile. The recently developed steady-state statistical sputtering model (SS-SSM) uses information from the MD simulations and incorporates it into a set of differential equations to predict a depth profile. In this study the distributions that provide the input to the SS-SSM are compared for simulations of 15 keV bombardment of Ag(111) by C 60, Au3 and Ar872 cluster beams.
|Original language||English (US)|
|Number of pages||4|
|Journal||Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms|
|State||Published - 2013|
All Science Journal Classification (ASJC) codes
- Nuclear and High Energy Physics