Comparable measurements and modeling of piezoelectric thin films for MEMS application

Thorsten Schmitz-Kempen, Stephan Tiedke, Peter Mardilovich, Subramanian Sivaramakrishnan, Thomas Lisec, Fabian Stoppel, Susan E. Trolier-McKinstry, Paul Muralt

Research output: Contribution to conferencePaper

2 Citations (Scopus)

Abstract

Accurate and reliable measurements of piezoelectric coefficients on thin films are required to perform thin film process development and compare different manufacturing techniques and quality especially in MEMS applications. State of the art measurements are performed by double-beam laser interferometry since many years, however the variety of parameter ranges and test conditions make it difficult to compare measurement results. Films on a substrate exhibit effective piezoelectric coefficients due to substrate clamping and the coefficient also depends on feature size and substrate thickness. This was shown by FEM simulations for the case of d33J measurements by DBLI [1] and latest simulation and measurement results show that a considerable reduction of the measured d33J was obtained for small electrodes and an increase for large electrodes. The measured d33J value at large electrodes is even larger than the true d33J of the film and for small feature sizes it is lower. A feature size chosen equivalent to the substrate thickness exhibits the most exact number for the effective coefficient d33J [2]. Furthermore nonlinearity and hysteresis of ferroelectric films requires the definition of measurement parameters to obtain comparable procedures regarding hysteresis, poling conditions, and other property nonlinearities, voltage and frequency dependency of coefficients, and large and small signal responses. For easier comparison of films a large signal coefficient (d33,ls) is introduced as the average slope of a displacement vs. voltage measurement over the full operating voltage range. For thin film measurements it reflects the potential displacement in typical actuator applications in comparison to small-signal coefficients and allows better comparison of materials for actuation.

Original languageEnglish (US)
Pages211-213
Number of pages3
DOIs
StatePublished - Jan 1 2013
Event2013 Joint IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy, ISAF/PFM 2013 - Prague 4, Czech Republic
Duration: Jul 21 2013Jul 25 2013

Other

Other2013 Joint IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy, ISAF/PFM 2013
CountryCzech Republic
CityPrague 4
Period7/21/137/25/13

Fingerprint

MEMS
Thin films
Control nonlinearities
Substrates
Electrodes
Hysteresis
Laser interferometry
Ferroelectric films
Voltage measurement
Electric potential
Actuators
Finite element method

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

Cite this

Schmitz-Kempen, T., Tiedke, S., Mardilovich, P., Sivaramakrishnan, S., Lisec, T., Stoppel, F., ... Muralt, P. (2013). Comparable measurements and modeling of piezoelectric thin films for MEMS application. 211-213. Paper presented at 2013 Joint IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy, ISAF/PFM 2013, Prague 4, Czech Republic. https://doi.org/10.1109/ISAF.2013.6748745
Schmitz-Kempen, Thorsten ; Tiedke, Stephan ; Mardilovich, Peter ; Sivaramakrishnan, Subramanian ; Lisec, Thomas ; Stoppel, Fabian ; Trolier-McKinstry, Susan E. ; Muralt, Paul. / Comparable measurements and modeling of piezoelectric thin films for MEMS application. Paper presented at 2013 Joint IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy, ISAF/PFM 2013, Prague 4, Czech Republic.3 p.
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Schmitz-Kempen, T, Tiedke, S, Mardilovich, P, Sivaramakrishnan, S, Lisec, T, Stoppel, F, Trolier-McKinstry, SE & Muralt, P 2013, 'Comparable measurements and modeling of piezoelectric thin films for MEMS application' Paper presented at 2013 Joint IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy, ISAF/PFM 2013, Prague 4, Czech Republic, 7/21/13 - 7/25/13, pp. 211-213. https://doi.org/10.1109/ISAF.2013.6748745

Comparable measurements and modeling of piezoelectric thin films for MEMS application. / Schmitz-Kempen, Thorsten; Tiedke, Stephan; Mardilovich, Peter; Sivaramakrishnan, Subramanian; Lisec, Thomas; Stoppel, Fabian; Trolier-McKinstry, Susan E.; Muralt, Paul.

2013. 211-213 Paper presented at 2013 Joint IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy, ISAF/PFM 2013, Prague 4, Czech Republic.

Research output: Contribution to conferencePaper

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T1 - Comparable measurements and modeling of piezoelectric thin films for MEMS application

AU - Schmitz-Kempen, Thorsten

AU - Tiedke, Stephan

AU - Mardilovich, Peter

AU - Sivaramakrishnan, Subramanian

AU - Lisec, Thomas

AU - Stoppel, Fabian

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AU - Muralt, Paul

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N2 - Accurate and reliable measurements of piezoelectric coefficients on thin films are required to perform thin film process development and compare different manufacturing techniques and quality especially in MEMS applications. State of the art measurements are performed by double-beam laser interferometry since many years, however the variety of parameter ranges and test conditions make it difficult to compare measurement results. Films on a substrate exhibit effective piezoelectric coefficients due to substrate clamping and the coefficient also depends on feature size and substrate thickness. This was shown by FEM simulations for the case of d33J measurements by DBLI [1] and latest simulation and measurement results show that a considerable reduction of the measured d33J was obtained for small electrodes and an increase for large electrodes. The measured d33J value at large electrodes is even larger than the true d33J of the film and for small feature sizes it is lower. A feature size chosen equivalent to the substrate thickness exhibits the most exact number for the effective coefficient d33J [2]. Furthermore nonlinearity and hysteresis of ferroelectric films requires the definition of measurement parameters to obtain comparable procedures regarding hysteresis, poling conditions, and other property nonlinearities, voltage and frequency dependency of coefficients, and large and small signal responses. For easier comparison of films a large signal coefficient (d33,ls) is introduced as the average slope of a displacement vs. voltage measurement over the full operating voltage range. For thin film measurements it reflects the potential displacement in typical actuator applications in comparison to small-signal coefficients and allows better comparison of materials for actuation.

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Schmitz-Kempen T, Tiedke S, Mardilovich P, Sivaramakrishnan S, Lisec T, Stoppel F et al. Comparable measurements and modeling of piezoelectric thin films for MEMS application. 2013. Paper presented at 2013 Joint IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy, ISAF/PFM 2013, Prague 4, Czech Republic. https://doi.org/10.1109/ISAF.2013.6748745