Comparable measurements and modeling of piezoelectric thin films for MEMS application

Thorsten Schmitz-Kempen, Stephan Tiedke, Peter Mardilovich, Subramanian Sivaramakrishnan, Thomas Lisec, Fabian Stoppel, Susan Trolier-Mckinstry, Paul Muralt

Research output: Contribution to conferencePaperpeer-review

2 Scopus citations

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Engineering & Materials Science