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Comparable measurements and modeling of piezoelectric thin films for MEMS application
Thorsten Schmitz-Kempen, Stephan Tiedke, Peter Mardilovich, Subramanian Sivaramakrishnan, Thomas Lisec, Fabian Stoppel, Susan Trolier-Mckinstry, Paul Muralt
Research output: Contribution to conference › Paper › peer-review
2
Scopus
citations