Comparative analysis of run-to-run control algorithms in the semiconductor manufacturing industry

Zhe Ning, James R. Moyne, Taber Smith, Duane Boning, Enrique Del Castillo, Jinn Yi Yeh, Arnon Hurwitz

Research output: Contribution to conferencePaperpeer-review

27 Citations (SciVal)

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Chemical Compounds

Engineering & Materials Science