The Si 2p binding energies measured from a series of silicon oxynitride thin films are related to the nitrogen contents of the films using a simple Pauling charge distribution model. The linear relation found between the binding energy and the calculated charge is expected if Si–N bonds replace Si–O bonds as the nitrogen content of the films is increased.
|Original language||English (US)|
|Number of pages||3|
|Journal||Journal of the American Ceramic Society|
|State||Published - Jan 1 1986|
All Science Journal Classification (ASJC) codes
- Ceramics and Composites
- Materials Chemistry