Compositionally Dependent Si 2p Binding Energy Shifts in Silicon Oxynitride Thin Films

RICHARD K. BROW, Carlo G. Pantano

Research output: Contribution to journalArticle

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Abstract

The Si 2p binding energies measured from a series of silicon oxynitride thin films are related to the nitrogen contents of the films using a simple Pauling charge distribution model. The linear relation found between the binding energy and the calculated charge is expected if Si–N bonds replace Si–O bonds as the nitrogen content of the films is increased.

Original languageEnglish (US)
Pages (from-to)314-316
Number of pages3
JournalJournal of the American Ceramic Society
Volume69
Issue number4
DOIs
StatePublished - Jan 1 1986

All Science Journal Classification (ASJC) codes

  • Ceramics and Composites
  • Materials Chemistry

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