TY - GEN
T1 - Concentric Micromirror Array for High-Speed Optical Dynamic Focusing
AU - Ersumo, Nathan Tessema
AU - Yalcin, Cem
AU - Pegard, Nicolas
AU - Waller, Laura
AU - Lopez, Daniel
AU - Muller, Rikky
N1 - Publisher Copyright:
© 2019 IEEE.
PY - 2019/7
Y1 - 2019/7
N2 - Optical dynamic focusing has emerged as a speed, complexity and efficiency bottleneck across various applications, which include scanning multi-photon microscopy in biology, maskless lithography and micromachining in material processing, and wavefront correction. Here, we present a 32-ring 23,852-pixel concentric micromirror array capable of performing dynamic focusing for wavelengths of up to 1040 nm with a response rate of up to 8.75 kHz, 30 V drive and a focusing full-width-halfmaximum to range ratio of 4.8%.
AB - Optical dynamic focusing has emerged as a speed, complexity and efficiency bottleneck across various applications, which include scanning multi-photon microscopy in biology, maskless lithography and micromachining in material processing, and wavefront correction. Here, we present a 32-ring 23,852-pixel concentric micromirror array capable of performing dynamic focusing for wavelengths of up to 1040 nm with a response rate of up to 8.75 kHz, 30 V drive and a focusing full-width-halfmaximum to range ratio of 4.8%.
UR - http://www.scopus.com/inward/record.url?scp=85077634785&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85077634785&partnerID=8YFLogxK
U2 - 10.1109/OMN.2019.8925234
DO - 10.1109/OMN.2019.8925234
M3 - Conference contribution
AN - SCOPUS:85077634785
T3 - International Conference on Optical MEMS and Nanophotonics
SP - 190
EP - 191
BT - OMN 2019 - 2019 International Conference on Optical MEMS and Nanophotonics, Proceedings
PB - IEEE Computer Society
T2 - 2019 International Conference on Optical MEMS and Nanophotonics, OMN 2019
Y2 - 28 July 2019 through 1 August 2019
ER -