Concentric Micromirror Array for High-Speed Optical Dynamic Focusing

Nathan Tessema Ersumo, Cem Yalcin, Nicolas Pegard, Laura Waller, Daniel Lopez, Rikky Muller

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

Optical dynamic focusing has emerged as a speed, complexity and efficiency bottleneck across various applications, which include scanning multi-photon microscopy in biology, maskless lithography and micromachining in material processing, and wavefront correction. Here, we present a 32-ring 23,852-pixel concentric micromirror array capable of performing dynamic focusing for wavelengths of up to 1040 nm with a response rate of up to 8.75 kHz, 30 V drive and a focusing full-width-halfmaximum to range ratio of 4.8%.

Original languageEnglish (US)
Title of host publicationOMN 2019 - 2019 International Conference on Optical MEMS and Nanophotonics, Proceedings
PublisherIEEE Computer Society
Pages190-191
Number of pages2
ISBN (Electronic)9781728145013
DOIs
StatePublished - Jul 2019
Event2019 International Conference on Optical MEMS and Nanophotonics, OMN 2019 - Daejeon, Korea, Republic of
Duration: Jul 28 2019Aug 1 2019

Publication series

NameInternational Conference on Optical MEMS and Nanophotonics
Volume2019-July
ISSN (Print)2160-5033
ISSN (Electronic)2160-5041

Conference

Conference2019 International Conference on Optical MEMS and Nanophotonics, OMN 2019
CountryKorea, Republic of
CityDaejeon
Period7/28/198/1/19

All Science Journal Classification (ASJC) codes

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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