Concept, modeling and fabrication techniques for large-stroke piezoelectric unimorph deformable mirrors

Eui Hyeok Yang, Kirill Shcheglov, Susan E. Trolier-McKinstry

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

Large-stroke micromachined deformable mirror technology can boost the imaging performance of an otherwise non-rigid, lower-quality telescope structure. The proposed deformable mirror concept in this paper combines a microfabricated large-stroke piezoelectric actuator with a reflective membrane "transferred" in its entirety from a separate wafer. This process allows the large-stroke actuation of the continuous membrane and can provide the necessary large wavefront correction. The micromachined deformable mirror approach allows mass-production of actuators as well as scalable structures with, high actuator densities. The piezoelectric unimorph actuator design approach delivers large actuator stroke with a highly localized influence function, while maintaining a surface figure of optical quality. Both of these component fabrication techniques are easily scaled to accommodate deformable mirrors with very large areas.

Original languageEnglish (US)
Pages (from-to)326-333
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4983
StatePublished - 2003

Fingerprint

Deformable Mirror
deformable mirrors
strokes
Stroke
Fabrication
Mirrors
Actuators
Piezoelectric actuators
Actuator
fabrication
Piezoelectric Actuator
piezoelectric actuators
actuators
Modeling
Membranes
Membrane
Wavefront Correction
Wavefronts
membranes
Telescopes

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

@article{44faec1353284b098298073021966ccc,
title = "Concept, modeling and fabrication techniques for large-stroke piezoelectric unimorph deformable mirrors",
abstract = "Large-stroke micromachined deformable mirror technology can boost the imaging performance of an otherwise non-rigid, lower-quality telescope structure. The proposed deformable mirror concept in this paper combines a microfabricated large-stroke piezoelectric actuator with a reflective membrane {"}transferred{"} in its entirety from a separate wafer. This process allows the large-stroke actuation of the continuous membrane and can provide the necessary large wavefront correction. The micromachined deformable mirror approach allows mass-production of actuators as well as scalable structures with, high actuator densities. The piezoelectric unimorph actuator design approach delivers large actuator stroke with a highly localized influence function, while maintaining a surface figure of optical quality. Both of these component fabrication techniques are easily scaled to accommodate deformable mirrors with very large areas.",
author = "Yang, {Eui Hyeok} and Kirill Shcheglov and Trolier-McKinstry, {Susan E.}",
year = "2003",
language = "English (US)",
volume = "4983",
pages = "326--333",
journal = "Proceedings of SPIE - The International Society for Optical Engineering",
issn = "0277-786X",
publisher = "SPIE",

}

TY - JOUR

T1 - Concept, modeling and fabrication techniques for large-stroke piezoelectric unimorph deformable mirrors

AU - Yang, Eui Hyeok

AU - Shcheglov, Kirill

AU - Trolier-McKinstry, Susan E.

PY - 2003

Y1 - 2003

N2 - Large-stroke micromachined deformable mirror technology can boost the imaging performance of an otherwise non-rigid, lower-quality telescope structure. The proposed deformable mirror concept in this paper combines a microfabricated large-stroke piezoelectric actuator with a reflective membrane "transferred" in its entirety from a separate wafer. This process allows the large-stroke actuation of the continuous membrane and can provide the necessary large wavefront correction. The micromachined deformable mirror approach allows mass-production of actuators as well as scalable structures with, high actuator densities. The piezoelectric unimorph actuator design approach delivers large actuator stroke with a highly localized influence function, while maintaining a surface figure of optical quality. Both of these component fabrication techniques are easily scaled to accommodate deformable mirrors with very large areas.

AB - Large-stroke micromachined deformable mirror technology can boost the imaging performance of an otherwise non-rigid, lower-quality telescope structure. The proposed deformable mirror concept in this paper combines a microfabricated large-stroke piezoelectric actuator with a reflective membrane "transferred" in its entirety from a separate wafer. This process allows the large-stroke actuation of the continuous membrane and can provide the necessary large wavefront correction. The micromachined deformable mirror approach allows mass-production of actuators as well as scalable structures with, high actuator densities. The piezoelectric unimorph actuator design approach delivers large actuator stroke with a highly localized influence function, while maintaining a surface figure of optical quality. Both of these component fabrication techniques are easily scaled to accommodate deformable mirrors with very large areas.

UR - http://www.scopus.com/inward/record.url?scp=0038396394&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0038396394&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:0038396394

VL - 4983

SP - 326

EP - 333

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

SN - 0277-786X

ER -