Condensed phase equilibria in transition metal-Ga-Sb systems and predictions for thermally stable contacts to GaSb

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Abstract

Antimonide-based compound semiconductors are promising candidates for high-frequency, low-power electronic devices as well as a variety of optoelectronic devices. To assist with the design of shallow or thermally stable contacts, we have performed thermodynamic calculations to estimate ternary phase equilibria in many of the transition metal-Ga-Sb systems. We have used the results of our calculations and a limited number of experiments to identify candidates for nonreactive elemental contacts to GaSb. Both W and Re are clearly in thermodynamic equilibrium with GaSb under the conditions considered in our study. Metal gallides and antimonides that are candidates for thermally stable contacts to GaSb are also highlighted.

Original languageEnglish (US)
Pages (from-to)1090-1099
Number of pages10
JournalJournal of Electronic Materials
Volume32
Issue number10
DOIs
StatePublished - Jan 1 2003

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

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