Conductive silicone based MEMS sensor and actuator

Adam Huang, Tak Sing Wong, Chih Ming Ho

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

In this paper, we have demonstrated the fabrication and preliminary characterization of SU-8 patterned conductive silicone polymer MEMS sensor and actuator; in the form of a suspended cross-beam accelerometer and an electrostatic fluidic valve. By integrating our recently developed silicone/carbon black composite patterning technique with surface and bulk micromachining technologies, we have exploited the material properties of conductive silicone polymers for active/passive MEMS devices. The cross-beam dimensions of the accelerometer are 7mm × 400μm × 25μm with a 500μm × 500μm × 250μm silicon proof mass at the center. Various sizes of the silicone valves (2 electrodes) and pumps (3 electrodes) were fabricated, with the smallest design for the pump measuring 600μm × 3mm × 35μm. Further size reduction to yield pumps and valves in the order of a hundred micron is possible with our developed fabrication technique.

Original languageEnglish (US)
Title of host publicationTRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
Pages1406-1411
Number of pages6
DOIs
StatePublished - Nov 9 2005
Event13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of
Duration: Jun 5 2005Jun 9 2005

Publication series

NameDigest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Volume2

Other

Other13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
CountryKorea, Republic of
CitySeoul
Period6/5/056/9/05

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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    Huang, A., Wong, T. S., & Ho, C. M. (2005). Conductive silicone based MEMS sensor and actuator. In TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers (pp. 1406-1411). [3E4.28] (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05; Vol. 2). https://doi.org/10.1109/SENSOR.2005.1497345