Continuous single crystal PbTiO3 thin films epitaxially grown on miscut (001)SrTiO3

Kiyotaka Wasa, Yoko Haneda, Toshifumi Satoh, Hideaki Adachi, Isaku Kanno, Kentaro Setsune, Darrell G. Schlom, Susan E. Trolier-McKinstry, Chang Beom Eom

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Abstract

Continuous single crystal (001)PbTiO3 (PT) thin films, 5 to 300 nm in thickness, were epitaxially grown on miscut (001)SrTiO3 (ST), miscut angle 1.7 degree, by rf-planar magnetron sputtering. The surface of the miscut substrates comprised periodic striped patterns with periodic step lines and terraces; the step height was 0.4 nm and terrace width was 14 nm. The surface of PT thin films also comprised periodic striped patterns; the step height was 1 to 3 nm and the terrace width was 50 to 150 nm. The film growth was governed by a step-flow growth with step-bunching. The layer growth mode of Frank-van der Merwe type was predominant and the surface was extremely flat on an atomic scale. The resultant epitaxial films showed a single crystal/single c-domain structure. Epitaxial growth on miscut substrate is essential to fabricate perovskite thin films with controlled microstructure.

Original languageEnglish (US)
JournalJournal of the Korean Physical Society
Volume32
Issue number4 SUPPL.
StatePublished - Dec 1 1998

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

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    Wasa, K., Haneda, Y., Satoh, T., Adachi, H., Kanno, I., Setsune, K., Schlom, D. G., Trolier-McKinstry, S. E., & Eom, C. B. (1998). Continuous single crystal PbTiO3 thin films epitaxially grown on miscut (001)SrTiO3. Journal of the Korean Physical Society, 32(4 SUPPL.).