Contribution of dielectric and metallic losses in RF/microwave tunable varactors using (Ba,Sr)TiO 3 thin films

Francisco Ayguavives, Zhang Jin, Ali Tombak, Jon-Paul Maria, Amir Mortazawi, Angus I. Kingon, Gregory T. Stauf, Craig Ragaglia, Jeffrey F. Roeder, Mike Brand

Research output: Contribution to journalConference articlepeer-review

2 Scopus citations

Abstract

Recently, there has been significant interest in use of (Ba,Sr)TiO3 (BST) thin films for tunable high frequency (RF and microwave) components. In a previous work we have shown that BST thin films grown by metalorganic chemical vapor deposition (MOCVD) exhibit films very low losses (as low as 0.003-0.004) and tunabilities over 50% at low operation voltages. In order to integrate BST thin films in tunable devices, the objectives of this work are : (i) study the effect of bottom and top electrode on the performance of thin film based capacitors, (ii) correlate low frequency (10 kHz) and high frequency (45 MHz - 1 GHz) measurements, (iii) separate the contribution of dielectric losses and metallic losses at both low and high frequency and finally (iv) show the potential usefulness of series capacitors structures.

Original languageEnglish (US)
Pages (from-to)393-402
Number of pages10
JournalIntegrated Ferroelectrics
Volume39
Issue number1-4
DOIs
StatePublished - Dec 1 2001
Event13th International Symposium on Integrated Ferroelectrics - Colorado Springs, CO, United States
Duration: Mar 11 2006Mar 14 2006

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Condensed Matter Physics
  • Materials Chemistry
  • Electrical and Electronic Engineering

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