The growth of YBaCuO thin films deposited by hollow magnetron sputtering on (100) and (110) SrTiO3 substrates has been studied as a function of deposition temperature, Ts. Besides the substrate orientation Ts is the parameter determining the growth direction. On (110) substrates films grow either in the (110) or in the mixed (110)/(013) direction. On (100) substrates c-axis orientation is observed at elevated temperatures (Ts ≈ 780-830°C) while a-axis orientation occurs at lower temperatures (Ts < 720°C). Deviations from oxygen stoichiometry are thought to be the intrinsic parameter controlling the growth.
|Original language||English (US)|
|Number of pages||5|
|Journal||Solid State Communications|
|State||Published - Jan 1989|
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Materials Chemistry