Controlled fabrication of nanostructure material based chemical sensors

Laura J. Evans, Gary W. Hunter, Jennifer C. Xu, Gordon M. Berger, Randall L. Vander Wal

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

In this paper, we report on a processing approach for a microsensor platform that incorporates nanorods in a controlled, efficient, and effective manner. Using mis novel approach of combining dielectrophoresis with standard microfabrication processing and materials, we have achieved reproducible, time-efficient fabrication of gas sensors with buried contacts to the tin oxide (SnO2) nanorods used for the detection of gases. The steps associated with this approach are described in detail. Semiconducting SnO2 nanorods are used to demonstrate this approach. The SnO2 nanorods succeeded as sensing elements for the detection of hydrogen (H2) and propylene (C3H6) up to 600°C, as well as the detection of nitrogen oxides (NOx) at 400°C This investigation shows the combination of nanorods and standard microfabrication processing materials resulting in a new technique for the fabrication of chemical microsensors using nanomaterials.

Original languageEnglish (US)
Title of host publicationFunctional Materials and Nanostructures for Chemical and Biochemical Sensing
Pages55-60
Number of pages6
StatePublished - Dec 1 2010
Event2010 MRS Spring Meeting - San Francisco, CA, United States
Duration: Apr 5 2010Apr 9 2010

Publication series

NameMaterials Research Society Symposium Proceedings
Volume1253
ISSN (Print)0272-9172

Other

Other2010 MRS Spring Meeting
CountryUnited States
CitySan Francisco, CA
Period4/5/104/9/10

Fingerprint

Chemical sensors
Nanorods
nanorods
Nanostructures
Fabrication
fabrication
sensors
Microsensors
Microfabrication
Processing
Nitrogen Oxides
nitrogen oxides
Nitrogen oxides
Electrophoresis
Tin oxides
propylene
gases
Nanostructured materials
Chemical elements
tin oxides

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Evans, L. J., Hunter, G. W., Xu, J. C., Berger, G. M., & Vander Wal, R. L. (2010). Controlled fabrication of nanostructure material based chemical sensors. In Functional Materials and Nanostructures for Chemical and Biochemical Sensing (pp. 55-60). (Materials Research Society Symposium Proceedings; Vol. 1253).
Evans, Laura J. ; Hunter, Gary W. ; Xu, Jennifer C. ; Berger, Gordon M. ; Vander Wal, Randall L. / Controlled fabrication of nanostructure material based chemical sensors. Functional Materials and Nanostructures for Chemical and Biochemical Sensing. 2010. pp. 55-60 (Materials Research Society Symposium Proceedings).
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Evans, LJ, Hunter, GW, Xu, JC, Berger, GM & Vander Wal, RL 2010, Controlled fabrication of nanostructure material based chemical sensors. in Functional Materials and Nanostructures for Chemical and Biochemical Sensing. Materials Research Society Symposium Proceedings, vol. 1253, pp. 55-60, 2010 MRS Spring Meeting, San Francisco, CA, United States, 4/5/10.

Controlled fabrication of nanostructure material based chemical sensors. / Evans, Laura J.; Hunter, Gary W.; Xu, Jennifer C.; Berger, Gordon M.; Vander Wal, Randall L.

Functional Materials and Nanostructures for Chemical and Biochemical Sensing. 2010. p. 55-60 (Materials Research Society Symposium Proceedings; Vol. 1253).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Evans LJ, Hunter GW, Xu JC, Berger GM, Vander Wal RL. Controlled fabrication of nanostructure material based chemical sensors. In Functional Materials and Nanostructures for Chemical and Biochemical Sensing. 2010. p. 55-60. (Materials Research Society Symposium Proceedings).