CP-MAS NMR and in-situ FTIR study of an AlN surface reactivity

S. A. Monie, David Jeffrey Aurentz, Carlo G. Pantano

Research output: Contribution to journalConference article

2 Scopus citations

Abstract

The hydrolytic stability of aluminum nitride (AlN) is an important issue from the standpoint of technology development of AlN as an electronic packaging material. Although numerous studies have been made of the hydrolysis of AlN and characterization of the reaction products, an understanding of the interaction between surface sites and molecular species is still lacking. A combination of Magic-Angle-Spinning Nuclear Magnetic Resonance (MAS NMR) and in-situ Fourier Transform Infrared (FTIR) spectroscopies was used to study the surface reactivity of AlN. The specimens used were specially fabricated self-supported AlN films of high-surface-area (approximately 25 m2/g), made by nitridation of sol-gel derived pseudoboehmite (AlO(OH)). The in-situ FTIR spectra suggest the formation of a surface layer on the AlN films upon storage. MAS NMR was used to further characterize the surface layer. Using the chemical shifts obtained by 1H-27Al Cross Polarization (CP) MAS NMR experiments, we were able to identify the surface cation sites. The assignment of these sites to Al3+ cations in either tetrahedral coordination with nitrogen or octahedral coordination with oxygen was used to monitor the evolution of the surface upon exposure to the atmosphere. The results indicate that high-surface-area AlN rapidly acquires a surface layer (probably AlO(OH)/Al(OH)3) upon exposure to the atmosphere.

Original languageEnglish (US)
Pages (from-to)389-392
Number of pages4
JournalMaterials Research Society Symposium - Proceedings
Volume410
StatePublished - Jan 1 1996
EventProceedings of the 1995 Fall MRS Symposium - Boston, MA, USA
Duration: Nov 27 1995Nov 30 1995

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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