Critical examination of growth rate for magnesium oxide (MgO) thin films deposited by molecular beam epitaxy with a molecular oxygen flux

Mark D. Losego, H. Spalding Craft, Elizabeth A. Paisley, Seiji Mita, Ramon Collazo, Zlatko Sitar, Jon-Paul Maria

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

The authors report a study of molecular beam deposition of MgO films on amorphous SiO2 and (0001) GaN surfaces over a large range of temperatures (25-400 °C) and molecular oxygen growth pressures (10 -7-10-4 Torr). This study provides insight into the growth behavior of an oxide with volatile metal constituents. Unlike other materials containing volatile constituents (e.g., GaAs, PbTiO3), all components of MgO become volatile at normal epitaxial growth temperatures (≥250 °C). Consequently, defining which species is the adsorption controller becomes ambiguous. Different growth regimes are delineated by the critical substrate temperature for Mg re-evaporation and the Mg:O flux ratio. These regimes have impact on phase purity, quartz crystal microbalance calibration, and film microstructure. The universal decay in deposition rate above growth 10-5 Torr O2 is also considered. By introducing a third flux of inert argon gas, rate reduction is attributed to increased molecular scattering and not oxidation of the metal source.

Original languageEnglish (US)
Pages (from-to)670-679
Number of pages10
JournalJournal of Materials Research
Volume25
Issue number4
DOIs
StatePublished - Apr 1 2010

Fingerprint

Magnesium Oxide
magnesium oxides
Molecular oxygen
Magnesia
Molecular beam epitaxy
Oxide films
molecular beam epitaxy
examination
Fluxes
Thin films
oxygen
thin films
Metals
Molecular beams
Argon
Quartz crystal microbalances
Growth temperature
Deposition rates
Epitaxial growth
Oxides

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Losego, Mark D. ; Craft, H. Spalding ; Paisley, Elizabeth A. ; Mita, Seiji ; Collazo, Ramon ; Sitar, Zlatko ; Maria, Jon-Paul. / Critical examination of growth rate for magnesium oxide (MgO) thin films deposited by molecular beam epitaxy with a molecular oxygen flux. In: Journal of Materials Research. 2010 ; Vol. 25, No. 4. pp. 670-679.
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Critical examination of growth rate for magnesium oxide (MgO) thin films deposited by molecular beam epitaxy with a molecular oxygen flux. / Losego, Mark D.; Craft, H. Spalding; Paisley, Elizabeth A.; Mita, Seiji; Collazo, Ramon; Sitar, Zlatko; Maria, Jon-Paul.

In: Journal of Materials Research, Vol. 25, No. 4, 01.04.2010, p. 670-679.

Research output: Contribution to journalArticle

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