Cryogenic motion performances of a piezoelectric single crystal micromotor

Xiaotian Li, Yuting Wu, Zhijiang Chen, Xiaoyong Wei, Haosu Luo, Shuxiang Dong

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10 Citations (SciVal)


This study investigates the cryogenic performances of a millimeter-size piezoelectric ultrasonic linear micromotor. The piezoelectric vibrator of the micromotor is made of Pb(In1/2Nb1/2)O3 -Pb(Mg1/3Nb2/3)-PbTiO3 single crystal and operated in first-bending wobbling mode. Experiments show that the piezoelectric single crystal micromotor works effectively even at extremely low temperature of -175 °C, although its resonance peaks vary with temperature significantly. This work confirms the feasibility of cryogenic operation of the piezo-micromotor, which is meaningful for aerospace or superconducting microwave application.

Original languageEnglish (US)
Article number144103
JournalJournal of Applied Physics
Issue number14
StatePublished - Apr 14 2014

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)


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