Defects and electronic transport in hydrogenated amorphous SiC films of interest for low dielectric constant back end of the line dielectric systems

T. A. Pomorski, B. C. Bittel, C. J. Cochrane, P. M. Lenahan, J. Bielefeld, S. W. King

Research output: Contribution to journal › Article › peer-review

25 Scopus citations

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Physics & Astronomy