Delta-shaped piezoelectric ultrasonic motor for two-dimensional positioning

Seung Ho Park, Jose Agraz, Safakcan Tuncdemir, Young Deog Kim, Richard E. Eitel, Amanda Baker, Clive A. Randall, Kenji Uchino

Research output: Contribution to journalArticle

12 Citations (Scopus)

Abstract

By fabricating on from lambda-shaped motors, bimorph delta-shaped motors have been developed and tested. A delta motor consists of two piezoelectric layers (bimorph structure) with four input electrodes and one common ground electrode -separated by an inactive bar that aids dimensional control in the sintering process. Two driving sources with a 90° phase difference were used for the x-, z-, and diagonal-axis direction driving. The design of the motor was modified and optimized by changing the relative dimensions and angle of the motor with the aid of ATILA finite element method (FEM) software. The optimum design with a small bandwidth between resonance modes, which provides the largest elliptical displacement, was fabricated using thick films. The fabricated motor size was below 10 mm 2 with several hundreds of nano meter motion at the tip. The speed of revolution, torque and efficiency in the two-dimensional space were measured.

Original languageEnglish (US)
Pages (from-to)313-318
Number of pages6
JournalJapanese Journal of Applied Physics
Volume47
Issue number1
DOIs
StatePublished - Jan 18 2008

Fingerprint

positioning
ultrasonics
Ultrasonics
Grounding electrodes
electrodes
Thick films
thick films
torque
sintering
finite element method
Sintering
Torque
bandwidth
computer programs
Bandwidth
Finite element method
Electrodes

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Park, Seung Ho ; Agraz, Jose ; Tuncdemir, Safakcan ; Kim, Young Deog ; Eitel, Richard E. ; Baker, Amanda ; Randall, Clive A. ; Uchino, Kenji. / Delta-shaped piezoelectric ultrasonic motor for two-dimensional positioning. In: Japanese Journal of Applied Physics. 2008 ; Vol. 47, No. 1. pp. 313-318.
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Delta-shaped piezoelectric ultrasonic motor for two-dimensional positioning. / Park, Seung Ho; Agraz, Jose; Tuncdemir, Safakcan; Kim, Young Deog; Eitel, Richard E.; Baker, Amanda; Randall, Clive A.; Uchino, Kenji.

In: Japanese Journal of Applied Physics, Vol. 47, No. 1, 18.01.2008, p. 313-318.

Research output: Contribution to journalArticle

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