Dependence of plasma-induced modification of polymer surfaces on polyatomic ion chemistry

Inkook Jang, Susan B. Sinnott

Research output: Contribution to journalArticle

10 Scopus citations

Abstract

The dependence of plasma-induced modification of polymer surfaces on polyatomic fluorocarbon ion chemistry was investigated. The classical molecular dynamic simulations were used for the study. The simulations numerically integrate Newton's equations of motion with a third order Nordsieck predictor corrector using a time step of 0.2 fs. It was observed that larger polyatomic ions C 3F 5 + produced a wider variety of precursors for film growth than smaller polyatomic ions such as CF 3 + and thus should be more effective at growing films.

Original languageEnglish (US)
Pages (from-to)5118-5120
Number of pages3
JournalApplied Physics Letters
Volume84
Issue number25
DOIs
StatePublished - Jun 21 2004

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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