Deposition and characterization of dielectric thin films from allyltrimethylsilane glow discharges

Antonella Milella, Fabio Palumbo, James L. Delattre, Francesco Fracassi, Riccardo d'Agostino

Research output: Contribution to journalArticlepeer-review

17 Scopus citations

Fingerprint Dive into the research topics of 'Deposition and characterization of dielectric thin films from allyltrimethylsilane glow discharges'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy