Deposition and electrical characterization of epitaxial Pb(Mg1/3Nb2/3)O3-PbTiO3 (70/30) thin films

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Abstract

(001)-oriented heterostructures consisting of LaAlO3 substrates, SrRuO3 bottom electrodes, and Pb(Mg1/3Nb2/3)O3-PbTiO3 (PMN-PT) piezoelectric actuators were deposited by pulsed laser deposition (PLD). 4-circle x-ray diffraction analysis confirmed the epitaxial growth of each layer. In general, the electrical properties were found to be very sensitive to the processing conditions, in particular, the growth temperature. At growth temperatures below ≈620°C, the temperature dependence of the dielectric constant and the onset of a hysteretic polarization were found to be depressed by as much as 80°C. When growth temperatures were increased above 660°C, electrical properties with temperature dependencies more consistent with those of single crystals were observed.

Original languageEnglish (US)
Pages (from-to)421-426
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Volume493
StatePublished - Jan 1 1998
EventProceedings of the 1997 MRS Fall Symposium - Boston, MA, USA
Duration: Nov 30 1997Dec 4 1997

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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