Depth profiling by cluster projectiles as seen by computer simulations

Z. Postawa, L. Rzeznik, R. Paruch, M. F. Russo, N. Winograd, B. J. Garrison

Research output: Contribution to journalArticlepeer-review

23 Scopus citations

Abstract

Molecular dynamics computer simulations are used to probe the development of the surface morphology and the processes that determine the depth resolution in depth profiling experiments performed by secondary ion and neutral mass spectrometry (SIMS/SNMS). The Ag(111) surface is irradiated by an impact of 20-keV Au3, C60 and Ar872 clusters that represent a broad range of cluster projectiles used in SIMS/SNMS experiments. Improvements in the simulation protocol including automation and optimal sample shape allow for at least 1000 consecutive impacts for each set of initial conditions. This novel approach allows to shrink the gap between single-impact simulations and real experiments in which numerous impacts are used.

Original languageEnglish (US)
Pages (from-to)12-15
Number of pages4
JournalSurface and Interface Analysis
Volume43
Issue number1-2
DOIs
StatePublished - Jan 2011

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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