Depth profiling of polycrystalline multilayers using a Buckminsterfullerene projectile

S. Sun; A. Wucher; C. Szakal; N. Winograd

doi:10.1063/1.1764594

Depth profiling of polycrystalline multilayers using a Buckminsterfullerene projectile

S. Sun, A. Wucher, C. Szakal, N. Winograd

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44 Scopus citations

Abstract

The use of buckminsterfullerene (c ₆₀ projectile for the sputter depth profiling of Ni:Cr structures, a polycrystalline multilayers, was discussed. The advantages of using C ₆₀ ⁺ primary ion source for depth profiling were improved depth resolution and faster erosion rates. The advantages were due to the less interlayer mixing, higher sputtering yield and less crater topography, which was resulted from C ₆₀ ⁺ bombardment. It was observed from the simulations that the C ₆₀ has a a shorter penetration depth and had caused less interlayer mixing.

Original language	English (US)
Pages (from-to)	5177-5179
Number of pages	3
Journal	Applied Physics Letters
Volume	84
Issue number	25
DOIs	https://doi.org/10.1063/1.1764594
State	Published - Jun 21 2004

All Science Journal Classification (ASJC) codes

Physics and Astronomy (miscellaneous)

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title = "Depth profiling of polycrystalline multilayers using a Buckminsterfullerene projectile",

abstract = "The use of buckminsterfullerene (c 60 projectile for the sputter depth profiling of Ni:Cr structures, a polycrystalline multilayers, was discussed. The advantages of using C 60 + primary ion source for depth profiling were improved depth resolution and faster erosion rates. The advantages were due to the less interlayer mixing, higher sputtering yield and less crater topography, which was resulted from C 60 + bombardment. It was observed from the simulations that the C 60 has a a shorter penetration depth and had caused less interlayer mixing.",

author = "S. Sun and A. Wucher and C. Szakal and N. Winograd",

note = "Funding Information: The authors thank Christine McGuiness for assistance in acquiring the AFM images. The authors also thank the National Science Foundation for partial financial support. ",

year = "2004",

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AU - Sun, S.

AU - Wucher, A.

AU - Szakal, C.

AU - Winograd, N.

N1 - Funding Information: The authors thank Christine McGuiness for assistance in acquiring the AFM images. The authors also thank the National Science Foundation for partial financial support.

PY - 2004/6/21

Y1 - 2004/6/21

N2 - The use of buckminsterfullerene (c 60 projectile for the sputter depth profiling of Ni:Cr structures, a polycrystalline multilayers, was discussed. The advantages of using C 60 + primary ion source for depth profiling were improved depth resolution and faster erosion rates. The advantages were due to the less interlayer mixing, higher sputtering yield and less crater topography, which was resulted from C 60 + bombardment. It was observed from the simulations that the C 60 has a a shorter penetration depth and had caused less interlayer mixing.

AB - The use of buckminsterfullerene (c 60 projectile for the sputter depth profiling of Ni:Cr structures, a polycrystalline multilayers, was discussed. The advantages of using C 60 + primary ion source for depth profiling were improved depth resolution and faster erosion rates. The advantages were due to the less interlayer mixing, higher sputtering yield and less crater topography, which was resulted from C 60 + bombardment. It was observed from the simulations that the C 60 has a a shorter penetration depth and had caused less interlayer mixing.

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Depth profiling of polycrystalline multilayers using a Buckminsterfullerene projectile

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