Abstract
The use of buckminsterfullerene (c 60 projectile for the sputter depth profiling of Ni:Cr structures, a polycrystalline multilayers, was discussed. The advantages of using C 60 + primary ion source for depth profiling were improved depth resolution and faster erosion rates. The advantages were due to the less interlayer mixing, higher sputtering yield and less crater topography, which was resulted from C 60 + bombardment. It was observed from the simulations that the C 60 has a a shorter penetration depth and had caused less interlayer mixing.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 5177-5179 |
| Number of pages | 3 |
| Journal | Applied Physics Letters |
| Volume | 84 |
| Issue number | 25 |
| DOIs | |
| State | Published - Jun 21 2004 |
All Science Journal Classification (ASJC) codes
- Physics and Astronomy (miscellaneous)
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Cite this
Sun, S., Wucher, A., Szakal, C., & Winograd, N. (2004). Depth profiling of polycrystalline multilayers using a Buckminsterfullerene projectile. Applied Physics Letters, 84(25), 5177-5179. https://doi.org/10.1063/1.1764594