Depth profiling of polycrystalline multilayers using a Buckminsterfullerene projectile

S. Sun, A. Wucher, C. Szakal, N. Winograd

Research output: Contribution to journalArticle

43 Scopus citations

Abstract

The use of buckminsterfullerene (c 60 projectile for the sputter depth profiling of Ni:Cr structures, a polycrystalline multilayers, was discussed. The advantages of using C 60 + primary ion source for depth profiling were improved depth resolution and faster erosion rates. The advantages were due to the less interlayer mixing, higher sputtering yield and less crater topography, which was resulted from C 60 + bombardment. It was observed from the simulations that the C 60 has a a shorter penetration depth and had caused less interlayer mixing.

Original languageEnglish (US)
Pages (from-to)5177-5179
Number of pages3
JournalApplied Physics Letters
Volume84
Issue number25
DOIs
StatePublished - Jun 21 2004

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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