The use of buckminsterfullerene (c 60 projectile for the sputter depth profiling of Ni:Cr structures, a polycrystalline multilayers, was discussed. The advantages of using C 60 + primary ion source for depth profiling were improved depth resolution and faster erosion rates. The advantages were due to the less interlayer mixing, higher sputtering yield and less crater topography, which was resulted from C 60 + bombardment. It was observed from the simulations that the C 60 has a a shorter penetration depth and had caused less interlayer mixing.
All Science Journal Classification (ASJC) codes
- Physics and Astronomy (miscellaneous)