TY - JOUR
T1 - Depth profiling studies of multilayer films with a C 60 + ion source
AU - Sostarecz, A. G.
AU - Sun, S.
AU - Szakal, C.
AU - Wucher, A.
AU - Winograd, N.
N1 - Funding Information:
The authors would like to thank the NIH and NSF for partial funding. We thank Greg Gillen for providing the NiCr multilayer sample.
PY - 2004/6/15
Y1 - 2004/6/15
N2 - A newly developed C 60 + primary ion beam source for time-of-flight secondary ion mass spectrometry has been employed for depth profiling analysis of organic and inorganic multilayer films. In particular, the C 60 + ion beam is used in the dc mode to sputter the surface for depth profiling while spectra are taken both with Ga + 15keV and C 60 + 20keV projectiles between sputtering cycles. From C 60 + bombardment of Langmuir-Blodgett films of barium arachidate, we find that cluster beams increase the secondary ion yields and ion formation efficiencies compared to monoatomic projectiles. For a 15-layer film, a barium arachidate fragment ion at m/z=208.9 was monitored as a function of C 60 + dose to determine that the sputtering rate is about 1.54nm/s and that the film interface position can be determined with a depth resolution of 16nm. For comparison purposes, a depth resolution of 8.7nm was measured for a sample consisting of 66nm of Ni and 53nm of Cr on Si(100) at a C 60 + beam energy of 20keV. The neutral atom yield was monitored via laser postionization to avoid matrix effects. These experiments show great promise for the use of C 60 + for depth profiling studies of multilayer targets.
AB - A newly developed C 60 + primary ion beam source for time-of-flight secondary ion mass spectrometry has been employed for depth profiling analysis of organic and inorganic multilayer films. In particular, the C 60 + ion beam is used in the dc mode to sputter the surface for depth profiling while spectra are taken both with Ga + 15keV and C 60 + 20keV projectiles between sputtering cycles. From C 60 + bombardment of Langmuir-Blodgett films of barium arachidate, we find that cluster beams increase the secondary ion yields and ion formation efficiencies compared to monoatomic projectiles. For a 15-layer film, a barium arachidate fragment ion at m/z=208.9 was monitored as a function of C 60 + dose to determine that the sputtering rate is about 1.54nm/s and that the film interface position can be determined with a depth resolution of 16nm. For comparison purposes, a depth resolution of 8.7nm was measured for a sample consisting of 66nm of Ni and 53nm of Cr on Si(100) at a C 60 + beam energy of 20keV. The neutral atom yield was monitored via laser postionization to avoid matrix effects. These experiments show great promise for the use of C 60 + for depth profiling studies of multilayer targets.
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U2 - 10.1016/j.apsusc.2004.03.111
DO - 10.1016/j.apsusc.2004.03.111
M3 - Article
AN - SCOPUS:2942623952
VL - 231-232
SP - 179
EP - 182
JO - Applied Surface Science
JF - Applied Surface Science
SN - 0169-4332
ER -