Design and fabrication of a microminiature thermocouple array for far-infrared radiation detection

D. G. Hasko, Srinivas A. Tadigadapa, J. R.A. Cleaver, H. Ahmed

Research output: Contribution to journalArticle

3 Scopus citations

Abstract

The fabrication of microminiature thermocouples for use with infrared radiation detectors is discussed and illustrated with some practical devices. In particular, the use of free-standing wires to achieve thermal isolation between the hot and cold junctions is described. This results in a well defined hot junction with small thermal capacity, thereby increasing the temperature rise for a given power input and so improving the sensitivity of the detector. Initial measurements of the performance of this device are presented.

Original languageEnglish (US)
Pages (from-to)83-86
Number of pages4
JournalMicroelectronic Engineering
Volume11
Issue number1-4
DOIs
StatePublished - Jan 1 1990

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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