Design and fabrication of prototype piezoelectric adjustable X-ray mirrors

Julian Walker, Tianning Liu, Mohit Tendulkar, David N. Burrows, Casey T. Deroo, Ryan Allured, Edward N. Hertz, Vincenzo Cotroneo, Paul B. Reid, Eric D. Schwartz, Thomas N. Jackson, Susan Trolier-Mckinstry

Research output: Contribution to journalArticlepeer-review

13 Scopus citations


Lynx, a next generation X-ray observatory concept currently under study, requires lightweight, high spatial resolution X-ray mirrors. Here we detail the development and fabrication of one of the candidate technologies for Lynx, piezoelectric adjustable X-ray optics. These X-ray mirrors are thin glass shell mirrors with Cr/Ir X-ray reflective coatings on the mirror side and piezoelectric thin film actuators on the actuator side. Magnetron sputtering was used to deposit metal electrodes and metal-oxide piezoelectric layers. The piezoelectric (Pb0.995(Zr0.52Ti0.48)0.99Nb0.01O3) was divided into 112 independent piezoelectric actuators, with 100% yield achieved. We discuss the fabrication procedure, residual thermal stresses and tuning of the Cr/Ir coating stress for the purposes of stress balancing.

Original languageEnglish (US)
Pages (from-to)27757-27772
Number of pages16
JournalOptics Express
Issue number21
StatePublished - Oct 15 2018

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics


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