Design and modeling of a MEMS pico-Newton loading/sensing device

B. A. Samuel; A. V. Desai; M. A. Haque

doi:10.1016/j.sna.2005.11.018

Design and modeling of a MEMS pico-Newton loading/sensing device

B. A. Samuel, A. V. Desai, M. A. Haque

Research output: Contribution to journal › Article › peer-review

30 Scopus citations

Abstract

In this paper we present a novel MEMS force sensor that exploits the post-buckling phenomenon of slender silicon columns. The design philosophy and fabrication process is discussed and analytical expressions for the force-displacement characteristics are developed. The sensor can be used to perform quantitative and qualitative measurements in-situ in SEM, TEM or STM, where the small chamber size makes it challenging to integrate conventional force-displacement sensors. Potential applications for the sensor are characterization of carbon nanotube-polymer interfaces, nanoscale thin film testing and mechanical testing of single biological cells.

Original language	English (US)
Pages (from-to)	155-162
Number of pages	8
Journal	Sensors and Actuators, A: Physical
Volume	127
Issue number	1
DOIs	https://doi.org/10.1016/j.sna.2005.11.018
State	Published - Feb 28 2006

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

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10.1016/j.sna.2005.11.018

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title = "Design and modeling of a MEMS pico-Newton loading/sensing device",

abstract = "In this paper we present a novel MEMS force sensor that exploits the post-buckling phenomenon of slender silicon columns. The design philosophy and fabrication process is discussed and analytical expressions for the force-displacement characteristics are developed. The sensor can be used to perform quantitative and qualitative measurements in-situ in SEM, TEM or STM, where the small chamber size makes it challenging to integrate conventional force-displacement sensors. Potential applications for the sensor are characterization of carbon nanotube-polymer interfaces, nanoscale thin film testing and mechanical testing of single biological cells.",

author = "Samuel, {B. A.} and Desai, {A. V.} and Haque, {M. A.}",

note = "Funding Information: We acknowledge support from NSF (CMS-0411603) for this research. The devices were fabricated at the Penn State Nanofabrication Facility, a member of the NSF's National Nanofabrication Users Network. ",

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AU - Desai, A. V.

AU - Haque, M. A.

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N2 - In this paper we present a novel MEMS force sensor that exploits the post-buckling phenomenon of slender silicon columns. The design philosophy and fabrication process is discussed and analytical expressions for the force-displacement characteristics are developed. The sensor can be used to perform quantitative and qualitative measurements in-situ in SEM, TEM or STM, where the small chamber size makes it challenging to integrate conventional force-displacement sensors. Potential applications for the sensor are characterization of carbon nanotube-polymer interfaces, nanoscale thin film testing and mechanical testing of single biological cells.

AB - In this paper we present a novel MEMS force sensor that exploits the post-buckling phenomenon of slender silicon columns. The design philosophy and fabrication process is discussed and analytical expressions for the force-displacement characteristics are developed. The sensor can be used to perform quantitative and qualitative measurements in-situ in SEM, TEM or STM, where the small chamber size makes it challenging to integrate conventional force-displacement sensors. Potential applications for the sensor are characterization of carbon nanotube-polymer interfaces, nanoscale thin film testing and mechanical testing of single biological cells.

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Design and modeling of a MEMS pico-Newton loading/sensing device

Abstract

All Science Journal Classification (ASJC) codes

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