Design and modeling of a MEMS pico-Newton loading/sensing device

B. A. Samuel, A. V. Desai, M. A. Haque

Research output: Contribution to journalArticlepeer-review

28 Scopus citations

Abstract

In this paper we present a novel MEMS force sensor that exploits the post-buckling phenomenon of slender silicon columns. The design philosophy and fabrication process is discussed and analytical expressions for the force-displacement characteristics are developed. The sensor can be used to perform quantitative and qualitative measurements in-situ in SEM, TEM or STM, where the small chamber size makes it challenging to integrate conventional force-displacement sensors. Potential applications for the sensor are characterization of carbon nanotube-polymer interfaces, nanoscale thin film testing and mechanical testing of single biological cells.

Original languageEnglish (US)
Pages (from-to)155-162
Number of pages8
JournalSensors and Actuators, A: Physical
Volume127
Issue number1
DOIs
StatePublished - Feb 28 2006

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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