Design and optimization of an optimizing adaptive quality controller, generic cell controller- enabled solution

Enrique Del Castillo, Jinn Yi Yeh, James Moyne, Victor Solakhian

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

In Chapter 11 we presented the design and implementation of two R2R control solutions. In this chapter we present a third R2R control solutions example, focusing on the use of the control algorithm and the integration of the algorithm with the control enabling mechanism. The control algorithm utilized is the optimizing adaptive quality controller (OAQC), as described in Chapter 4, and the control-enabling technology is the Generic Cell Controller (GCC) as described in Chapter 9.

Original languageEnglish (US)
Title of host publicationRun-to-Run Control in Semiconductor Manufacturing
PublisherCRC Press
Pages191-202
Number of pages12
ISBN (Electronic)9781420040661
ISBN (Print)0849311780, 9780849311789
Publication statusPublished - Jan 1 2000

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All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Del Castillo, E., Yeh, J. Y., Moyne, J., & Solakhian, V. (2000). Design and optimization of an optimizing adaptive quality controller, generic cell controller- enabled solution. In Run-to-Run Control in Semiconductor Manufacturing (pp. 191-202). CRC Press.