In Chapter 11 we presented the design and implementation of two R2R control solutions. In this chapter we present a third R2R control solutions example, focusing on the use of the control algorithm and the integration of the algorithm with the control enabling mechanism. The control algorithm utilized is the optimizing adaptive quality controller (OAQC), as described in Chapter 4, and the control-enabling technology is the Generic Cell Controller (GCC) as described in Chapter 9.
|Original language||English (US)|
|Title of host publication||Run-to-Run Control in Semiconductor Manufacturing|
|Number of pages||12|
|ISBN (Print)||0849311780, 9780849311789|
|Publication status||Published - Jan 1 2000|
All Science Journal Classification (ASJC) codes