Design, manufacture, and testing of nanometer-level spindle metrology testballs

Byron R. Knapp, David A. Arneson, Melvin J. Liebers, Eric Russell Marsh, Eric E. Keller

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    Nanometer-level spindle metrology requires a suitable artifact, an accurate sensor, stiff fixturing, and a low-noise data acquisition and display system [1]. A commonly used artifact for this purpose is a lapped sphere, referred to here as a testball. This paper discusses spindle metrology and the aspects of testball design, ball lapping, metrology, and calibration using multiprobe error separation.

    Original languageEnglish (US)
    Title of host publicationProceedings - ASPE 2011 Annual Meeting
    Pages495-498
    Number of pages4
    Volume52
    StatePublished - 2011
    Event26th Annual Meeting of the American Society for Precision Engineering, ASPE 2011 - Denver, CO, United States
    Duration: Nov 13 2011Nov 18 2011

    Other

    Other26th Annual Meeting of the American Society for Precision Engineering, ASPE 2011
    CountryUnited States
    CityDenver, CO
    Period11/13/1111/18/11

    All Science Journal Classification (ASJC) codes

    • Engineering (miscellaneous)

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