Design, manufacture, and testing of nanometer-level spindle metrology testballs

Byron R. Knapp; David A. Arneson; Melvin J. Liebers; Eric Russell Marsh; Eric E. Keller

Design, manufacture, and testing of nanometer-level spindle metrology testballs

Byron R. Knapp, David A. Arneson, Melvin J. Liebers, Eric Russell Marsh, Eric E. Keller

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Nanometer-level spindle metrology requires a suitable artifact, an accurate sensor, stiff fixturing, and a low-noise data acquisition and display system [1]. A commonly used artifact for this purpose is a lapped sphere, referred to here as a testball. This paper discusses spindle metrology and the aspects of testball design, ball lapping, metrology, and calibration using multiprobe error separation.

Original language	English (US)
Title of host publication	Proceedings - ASPE 2011 Annual Meeting
Pages	495-498
Number of pages	4
Volume	52
State	Published - 2011
Event	26th Annual Meeting of the American Society for Precision Engineering, ASPE 2011 - Denver, CO, United States Duration: Nov 13 2011 → Nov 18 2011

Other

Other	26th Annual Meeting of the American Society for Precision Engineering, ASPE 2011
Country/Territory	United States
City	Denver, CO
Period	11/13/11 → 11/18/11

All Science Journal Classification (ASJC) codes

Engineering (miscellaneous)

Cite this

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title = "Design, manufacture, and testing of nanometer-level spindle metrology testballs",

abstract = "Nanometer-level spindle metrology requires a suitable artifact, an accurate sensor, stiff fixturing, and a low-noise data acquisition and display system [1]. A commonly used artifact for this purpose is a lapped sphere, referred to here as a testball. This paper discusses spindle metrology and the aspects of testball design, ball lapping, metrology, and calibration using multiprobe error separation.",

author = "Knapp, {Byron R.} and Arneson, {David A.} and Liebers, {Melvin J.} and Marsh, {Eric Russell} and Keller, {Eric E.}",

year = "2011",

language = "English (US)",

isbn = "9781887706582",

volume = "52",

pages = "495--498",

booktitle = "Proceedings - ASPE 2011 Annual Meeting",

note = "26th Annual Meeting of the American Society for Precision Engineering, ASPE 2011 ; Conference date: 13-11-2011 Through 18-11-2011",

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TY - GEN

T1 - Design, manufacture, and testing of nanometer-level spindle metrology testballs

AU - Knapp, Byron R.

AU - Arneson, David A.

AU - Liebers, Melvin J.

AU - Marsh, Eric Russell

AU - Keller, Eric E.

PY - 2011

Y1 - 2011

N2 - Nanometer-level spindle metrology requires a suitable artifact, an accurate sensor, stiff fixturing, and a low-noise data acquisition and display system [1]. A commonly used artifact for this purpose is a lapped sphere, referred to here as a testball. This paper discusses spindle metrology and the aspects of testball design, ball lapping, metrology, and calibration using multiprobe error separation.

AB - Nanometer-level spindle metrology requires a suitable artifact, an accurate sensor, stiff fixturing, and a low-noise data acquisition and display system [1]. A commonly used artifact for this purpose is a lapped sphere, referred to here as a testball. This paper discusses spindle metrology and the aspects of testball design, ball lapping, metrology, and calibration using multiprobe error separation.

UR - http://www.scopus.com/inward/record.url?scp=84884317248&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84884317248&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:84884317248

SN - 9781887706582

VL - 52

SP - 495

EP - 498

BT - Proceedings - ASPE 2011 Annual Meeting

T2 - 26th Annual Meeting of the American Society for Precision Engineering, ASPE 2011

Y2 - 13 November 2011 through 18 November 2011

ER -

Design, manufacture, and testing of nanometer-level spindle metrology testballs

Abstract

Other

All Science Journal Classification (ASJC) codes

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