Design of a gimbaled compliant mechanism stage for precision motion and dynamic control in Z, θx & θY directions

Spencer Szczesny, Amos G. Winter V

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Obtaining precise motion control of a compliant mechanism is often hindered by competing kinematic, mechanic and dynamic requirements. Resonances limit the control bandwidth while compliance requirements limit the mechanism's directional stiffness. This paper investigates the improvements possible for three-axis Z, θX and θY diaphragm flexure stages through the use of a design (T-Flex) with members compliant in bending and torsion. According to analytical modeling and FEA, the T-Flex is capable of removing problematic resonant modes of vibration without significantly increasing the axial or tilt stiffness. Bench-level experimentation was conducted on various configurations of compliant mechanisms to determine their effects on the motion characteristics for precision engineering applications. The results indicate that by pairing the T-Flex with a radially stiff compliant mechanism, gimbaled motion can be achieved, providing 7.0 nm/μm lateral cross-axis (parasitic) motions. The mechanism exhibits linear axial and tilt stiffness of 0.195 N/μm and 5.37×10-6 N-m/μrad, respectively. Dynamic testing agreed with the FEA prediction of the first natural frequency to within 10 %. The T-Flex coupled with the stiff radial flexure has the potential to provide a precise three-axis configuration with a fundamental resonant frequency of 600 Hz.

Original languageEnglish (US)
Title of host publicationProceedings of the ASME Design Engineering Technical Conference and Computers and Information in Engineering Conference 2004
Subtitle of host publicationVolume 2: 28th Biennial Mechanisms and Robotics Conference
Pages1535-1540
Number of pages6
Volume2 B
StatePublished - 2004
Event2004 ASME Design Engineering Technical Conferences and Computers and Information in Engineering Conference - Salt Lake City, UT, United States
Duration: Sep 28 2004Oct 2 2004

Other

Other2004 ASME Design Engineering Technical Conferences and Computers and Information in Engineering Conference
CountryUnited States
CitySalt Lake City, UT
Period9/28/0410/2/04

Fingerprint

Compliant mechanisms
Stiffness
Natural frequencies
Precision engineering
Finite element method
Motion control
Diaphragms
Torsional stress
Mechanics
Kinematics
Bandwidth
Testing

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Szczesny, S., & Winter V, A. G. (2004). Design of a gimbaled compliant mechanism stage for precision motion and dynamic control in Z, θx & θY directions. In Proceedings of the ASME Design Engineering Technical Conference and Computers and Information in Engineering Conference 2004: Volume 2: 28th Biennial Mechanisms and Robotics Conference (Vol. 2 B, pp. 1535-1540)
Szczesny, Spencer ; Winter V, Amos G. / Design of a gimbaled compliant mechanism stage for precision motion and dynamic control in Z, θx & θY directions. Proceedings of the ASME Design Engineering Technical Conference and Computers and Information in Engineering Conference 2004: Volume 2: 28th Biennial Mechanisms and Robotics Conference. Vol. 2 B 2004. pp. 1535-1540
@inproceedings{b6ece6753f774f9782deeb1e925a96b0,
title = "Design of a gimbaled compliant mechanism stage for precision motion and dynamic control in Z, θx & θY directions",
abstract = "Obtaining precise motion control of a compliant mechanism is often hindered by competing kinematic, mechanic and dynamic requirements. Resonances limit the control bandwidth while compliance requirements limit the mechanism's directional stiffness. This paper investigates the improvements possible for three-axis Z, θX and θY diaphragm flexure stages through the use of a design (T-Flex) with members compliant in bending and torsion. According to analytical modeling and FEA, the T-Flex is capable of removing problematic resonant modes of vibration without significantly increasing the axial or tilt stiffness. Bench-level experimentation was conducted on various configurations of compliant mechanisms to determine their effects on the motion characteristics for precision engineering applications. The results indicate that by pairing the T-Flex with a radially stiff compliant mechanism, gimbaled motion can be achieved, providing 7.0 nm/μm lateral cross-axis (parasitic) motions. The mechanism exhibits linear axial and tilt stiffness of 0.195 N/μm and 5.37×10-6 N-m/μrad, respectively. Dynamic testing agreed with the FEA prediction of the first natural frequency to within 10 {\%}. The T-Flex coupled with the stiff radial flexure has the potential to provide a precise three-axis configuration with a fundamental resonant frequency of 600 Hz.",
author = "Spencer Szczesny and {Winter V}, {Amos G.}",
year = "2004",
language = "English (US)",
volume = "2 B",
pages = "1535--1540",
booktitle = "Proceedings of the ASME Design Engineering Technical Conference and Computers and Information in Engineering Conference 2004",

}

Szczesny, S & Winter V, AG 2004, Design of a gimbaled compliant mechanism stage for precision motion and dynamic control in Z, θx & θY directions. in Proceedings of the ASME Design Engineering Technical Conference and Computers and Information in Engineering Conference 2004: Volume 2: 28th Biennial Mechanisms and Robotics Conference. vol. 2 B, pp. 1535-1540, 2004 ASME Design Engineering Technical Conferences and Computers and Information in Engineering Conference, Salt Lake City, UT, United States, 9/28/04.

Design of a gimbaled compliant mechanism stage for precision motion and dynamic control in Z, θx & θY directions. / Szczesny, Spencer; Winter V, Amos G.

Proceedings of the ASME Design Engineering Technical Conference and Computers and Information in Engineering Conference 2004: Volume 2: 28th Biennial Mechanisms and Robotics Conference. Vol. 2 B 2004. p. 1535-1540.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Design of a gimbaled compliant mechanism stage for precision motion and dynamic control in Z, θx & θY directions

AU - Szczesny, Spencer

AU - Winter V, Amos G.

PY - 2004

Y1 - 2004

N2 - Obtaining precise motion control of a compliant mechanism is often hindered by competing kinematic, mechanic and dynamic requirements. Resonances limit the control bandwidth while compliance requirements limit the mechanism's directional stiffness. This paper investigates the improvements possible for three-axis Z, θX and θY diaphragm flexure stages through the use of a design (T-Flex) with members compliant in bending and torsion. According to analytical modeling and FEA, the T-Flex is capable of removing problematic resonant modes of vibration without significantly increasing the axial or tilt stiffness. Bench-level experimentation was conducted on various configurations of compliant mechanisms to determine their effects on the motion characteristics for precision engineering applications. The results indicate that by pairing the T-Flex with a radially stiff compliant mechanism, gimbaled motion can be achieved, providing 7.0 nm/μm lateral cross-axis (parasitic) motions. The mechanism exhibits linear axial and tilt stiffness of 0.195 N/μm and 5.37×10-6 N-m/μrad, respectively. Dynamic testing agreed with the FEA prediction of the first natural frequency to within 10 %. The T-Flex coupled with the stiff radial flexure has the potential to provide a precise three-axis configuration with a fundamental resonant frequency of 600 Hz.

AB - Obtaining precise motion control of a compliant mechanism is often hindered by competing kinematic, mechanic and dynamic requirements. Resonances limit the control bandwidth while compliance requirements limit the mechanism's directional stiffness. This paper investigates the improvements possible for three-axis Z, θX and θY diaphragm flexure stages through the use of a design (T-Flex) with members compliant in bending and torsion. According to analytical modeling and FEA, the T-Flex is capable of removing problematic resonant modes of vibration without significantly increasing the axial or tilt stiffness. Bench-level experimentation was conducted on various configurations of compliant mechanisms to determine their effects on the motion characteristics for precision engineering applications. The results indicate that by pairing the T-Flex with a radially stiff compliant mechanism, gimbaled motion can be achieved, providing 7.0 nm/μm lateral cross-axis (parasitic) motions. The mechanism exhibits linear axial and tilt stiffness of 0.195 N/μm and 5.37×10-6 N-m/μrad, respectively. Dynamic testing agreed with the FEA prediction of the first natural frequency to within 10 %. The T-Flex coupled with the stiff radial flexure has the potential to provide a precise three-axis configuration with a fundamental resonant frequency of 600 Hz.

UR - http://www.scopus.com/inward/record.url?scp=13944282960&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=13944282960&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:13944282960

VL - 2 B

SP - 1535

EP - 1540

BT - Proceedings of the ASME Design Engineering Technical Conference and Computers and Information in Engineering Conference 2004

ER -

Szczesny S, Winter V AG. Design of a gimbaled compliant mechanism stage for precision motion and dynamic control in Z, θx & θY directions. In Proceedings of the ASME Design Engineering Technical Conference and Computers and Information in Engineering Conference 2004: Volume 2: 28th Biennial Mechanisms and Robotics Conference. Vol. 2 B. 2004. p. 1535-1540