Design of a shallow thermally stable ohmic contact to p-type InGaSb

S. H. Wang, S. E. Mohney, B. A. Hull, B. R. Bennett

Research output: Contribution to journalArticlepeer-review

22 Scopus citations
Original languageEnglish (US)
Pages (from-to)633-640
Number of pages8
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume21
Issue number2
DOIs
StatePublished - Jan 1 2003

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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