Design of An Ultrahigh Vacuum Direct-Drive, Cryogenic Sample Manipulator Providing Two Degrees of Rotational Freedom

Robert M. Braun, Nicholas Winograd

Research output: Contribution to journalLetterpeer-review

Abstract

An ultrahigh vacuum direct-drive, cryogenic sample manipulator is described. It is fully bakeable in UHV, uses no lubricants, and does not require differentially pumped seals. It provides independent polar and azimuthal rotation of a sample, three degrees of translational freedom, electron-beam heating, as well as cooling to 100 K using liquid nitrogen.

Original languageEnglish (US)
Pages (from-to)2867-2870
Number of pages4
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume11
Issue number5
DOIs
StatePublished - 1993

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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