Destructive abatement of CF4 and C2F6 via a plasma induced reaction with CaO

James L. Delattre, Todd L. Friedman, Angelica M. Stacy

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Abstract

The plasma induced reactions of CF4 and C2F6 with CaO powder were examined in an effort to develop new methodologies for perfluorocarbon abatement. The reaction of CaO with CF4 (10 sccm flow), activated by an inductively coupled plasma (500 W and 100 mTorr) resulted in the destruction of >70% of the CF4. Under the same conditions >80% of C2F6 was destroyed. For both reactions, the major solid product is polycrystalline CaF2, an environmentally benign mineral with commercial value. The major gaseous products are CO and CO2. These reaction products are attractive alternatives to fluorine-containing byproducts such as F2(g), COF2(g), and HF(aq) generated by traditional perfluorocarbon abatement techniques.

Original languageEnglish (US)
Pages (from-to)2664-2666
Number of pages3
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume17
Issue number6
Publication statusPublished - Dec 1 1999

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All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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