DFT Investigation into Alumina ALD Growth Inhibition on Hydroxylated Amorphous Silica Surface

Aditya Shankar Sandupatla, Konstantinos Alexopoulos, Marie Françoise Reyniers, Guy B. Marin

Research output: Contribution to journalArticlepeer-review

15 Scopus citations

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Engineering & Materials Science

Chemical Compounds

Physics & Astronomy