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Dive into the research topics of 'DFT Investigation into Alumina ALD Growth Inhibition on Hydroxylated Amorphous Silica Surface'. Together they form a unique fingerprint.
Engineering & Materials Science
Atomic layer deposition
Discrete Fourier transforms
Silica
Alumina
Water
MOSFET devices
Molecular dynamics
Impurities
Semiconductor materials
Oxides
Aluminum
Carbon
Substrates
Chemical Compounds
Atomic layer deposition
Silicon Dioxide
Discrete Fourier transforms
Water
Hydroxyl Radical
Oxides
MOSFET devices
Molecular dynamics
Carbon
Aluminum oxide
Impurities
Semiconductor materials
Substrates
Physics & Astronomy
atomic layer epitaxy
aluminum oxides
silicon dioxide
water
field effect transistors
cycles
metal oxide semiconductors
trapping
molecular dynamics
aluminum
carbon
impurities
oxides