Poly(chloro-p- Xylene) or Parylene - C thin films are particularly attractive for dielectric as well as biomedical applications. In the current work the dielectric properties of Parylene-C thin films are investigated to form laminar composites with oxide thin films for high energy density pulsed power capacitors. Parylene-C thin films were synthesized by pyrolytic vapor decomposition polymerization of dichloro-di(p-Xylene) monomer. Annealing of films at 225°C has shown to enhance crystallinity of film. Conduction in Parylene-C thin films appears to be bulk-controlled with the hopping charges contributing to leakage current. The barrier height of 0.89eV and hopping distance of 2 - 2.5nm are physically plausible and similar to previously reported values in polymer literature.