Dielectric measurements on substrate materials at microwave frequencies using a cavity perturbation technique

D. C. Dube, Michael T. Lanagan, J. H. Kim, S. J. Jang

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Abstract

A cavity perturbation resonance technique suitable for microwave measurements on substrate materials is discussed. The technique makes use of thin rectangular samples placed in a rectangular waveguide cavity (Q∼5000). The availability of advanced microwave measurement equipment makes it possible to record experimental data at several frequencies (five in this present case). The estimated accuracy of measurements is ±2% for dielectric constant and 3×10 -4 for dielectric loss. Results are reported in the 8.2-12.4-GHz frequency range for alumina and specially prepared silica.

Original languageEnglish (US)
Pages (from-to)2466-2468
Number of pages3
JournalJournal of Applied Physics
Volume63
Issue number7
DOIs
StatePublished - Dec 1 1988

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All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

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