Dielectric property measurement of sub-micron thin film by differential time-domain spectroscopy

Kwang Su Lee, Jin Young Kim, Jeffery B. Fortin, Zhiping Jiang, Ming Li, Toh Ming Lu, X. C. Zhang

Research output: Contribution to journalArticle

3 Scopus citations

Abstract

Differential time-domain spectroscopy allows the dielectric property measurement of sub-micron films in the frequency rage from GHz to THz. We present measurement of dielectric property of sub-micron thin film.

Original languageEnglish (US)
Pages (from-to)232-234
Number of pages3
JournalSpringer Series in Chemical Physics
Volume66
Publication statusPublished - Dec 1 2001

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All Science Journal Classification (ASJC) codes

  • Physical and Theoretical Chemistry

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