Dielectric property measurement of sub-micron thin film by differential time-domain spectroscopy

Kwang Su Lee, Jin Young Kim, Jeffery B. Fortin, Zhiping Jiang, Ming Li, Toh Ming Lu, X. C. Zhang

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

Differential time-domain spectroscopy allows the dielectric property measurement of sub-micron films in the frequency rage from GHz to THz. We present measurement of dielectric property of sub-micron thin film.

Original languageEnglish (US)
Pages (from-to)232-234
Number of pages3
JournalSpringer Series in Chemical Physics
Volume66
StatePublished - Dec 1 2001

Fingerprint

Dielectric properties
dielectric properties
Spectroscopy
Thin films
thin films
spectroscopy

All Science Journal Classification (ASJC) codes

  • Physical and Theoretical Chemistry

Cite this

Lee, Kwang Su ; Kim, Jin Young ; Fortin, Jeffery B. ; Jiang, Zhiping ; Li, Ming ; Lu, Toh Ming ; Zhang, X. C. / Dielectric property measurement of sub-micron thin film by differential time-domain spectroscopy. In: Springer Series in Chemical Physics. 2001 ; Vol. 66. pp. 232-234.
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Dielectric property measurement of sub-micron thin film by differential time-domain spectroscopy. / Lee, Kwang Su; Kim, Jin Young; Fortin, Jeffery B.; Jiang, Zhiping; Li, Ming; Lu, Toh Ming; Zhang, X. C.

In: Springer Series in Chemical Physics, Vol. 66, 01.12.2001, p. 232-234.

Research output: Contribution to journalArticle

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AU - Lu, Toh Ming

AU - Zhang, X. C.

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